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Characterization of Process Induced Surface Profiles and Lattice Strains using Optical Surface Profilometry and Multi-wavelength Raman Spectroscopy
ECS Transactions
◽
10.1149/1.2911518
◽
2019
◽
Vol 13
(1)
◽
pp. 359-366
◽
Cited By ~ 3
Author(s):
Woo Sik Yoo
◽
Takeshi Ueda
◽
Junya Kajiwara
◽
Toshikazu Ishigaki
◽
Kitaek Kang
Keyword(s):
Raman Spectroscopy
◽
Optical Surface
◽
Surface Profilometry
◽
Lattice Strains
◽
Multi Wavelength
◽
Surface Profiles
Download Full-text
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References
Characterization of Process Induced Surface Profiles and Lattice Strains using Optical Surface Profilometry and Multi-wavelength Raman Spectroscopy
ECS Meeting Abstracts
◽
10.1149/ma2008-01/16/660
◽
2008
◽
Keyword(s):
Raman Spectroscopy
◽
Optical Surface
◽
Surface Profilometry
◽
Lattice Strains
◽
Multi Wavelength
◽
Surface Profiles
Download Full-text
Evaluation of Very High Resolution Multi-Wavelength Raman Spectroscopy for In-Line Characterization of Patterned Epitaxial Si1-xGex Layers on Si(100) Wafers
ECS Transactions
◽
10.1149/1.3568862
◽
2019
◽
Vol 35
(2)
◽
pp. 205-212
◽
Cited By ~ 5
Author(s):
Victor Vartanian
◽
Takeshi Ueda
◽
Toshikazu Ishigaki
◽
Kitaek Kang
◽
Woo Sik Yoo
Keyword(s):
Raman Spectroscopy
◽
High Resolution
◽
Multi Wavelength
◽
Very High
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Characterization of uni-axially stressed Si and Ge concentration in Si1-xGex using polychromator-based multi-wavelength Raman spectroscopy
2009 International Workshop on Junction Technology
◽
10.1109/iwjt.2009.5166224
◽
2009
◽
Cited By ~ 2
Author(s):
Woo Sik Yoo
◽
Takeshi Ueda
◽
Kitaek Kang
Keyword(s):
Raman Spectroscopy
◽
Multi Wavelength
Download Full-text
Stress Characterization of Tungsten-Filled Through Silicon via Arrays Using Very High Resolution Multi-Wavelength Raman Spectroscopy
ECS Transactions
◽
10.1149/1.3568852
◽
2019
◽
Vol 35
(2)
◽
pp. 105-115
◽
Cited By ~ 6
Author(s):
Jeff Gambino
◽
Daniel Vanslette
◽
Bucknell Webb
◽
Cameron Luce
◽
Takeshi Ueda
◽
...
Keyword(s):
Raman Spectroscopy
◽
High Resolution
◽
Through Silicon Via
◽
Multi Wavelength
◽
Very High
Download Full-text
Evaluation of Very High Resolution Multi-Wavelength Raman Spectroscopy for In-Line Characterization of Patterned Epitaxial Si1-xGex Layers on Si(100) Wafers
ECS Meeting Abstracts
◽
10.1149/ma2011-01/16/1134
◽
2011
◽
Keyword(s):
Raman Spectroscopy
◽
High Resolution
◽
Multi Wavelength
◽
Very High
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Non-contact, non-destructive characterization of Ge content and SiGe layer thickness using multi-wavelength Raman spectroscopy
2009 17th International Conference on Advanced Thermal Processing of Semiconductors
◽
10.1109/rtp.2009.5373439
◽
2009
◽
Author(s):
Woo Sik Yoo
◽
Takeshi Ueda
◽
Toshikazu Ishigaki
◽
Kitaek Kang
Keyword(s):
Raman Spectroscopy
◽
Layer Thickness
◽
Sige Layer
◽
Multi Wavelength
◽
Non Destructive
◽
Non Destructive Characterization
Download Full-text
Stress Characterization of Tungsten-Filled through Silicon via Arrays Using Very High Resolution Multi-Wavelength Raman Spectroscopy
ECS Meeting Abstracts
◽
10.1149/ma2011-01/16/1152
◽
2011
◽
Keyword(s):
Raman Spectroscopy
◽
High Resolution
◽
Through Silicon Via
◽
Multi Wavelength
◽
Very High
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Global and Local Stress Characterization of SiN/Si(100) Wafers Using Optical Surface Profilometer and Multiwavelength Raman Spectroscopy
ECS Transactions
◽
10.1149/1.3572324
◽
2019
◽
Vol 35
(4)
◽
pp. 861-871
◽
Cited By ~ 2
Author(s):
Woo Sik Yoo
◽
Junya Kajiwara
◽
Takeshi Ueda
◽
Toshikazu Ishigaki
◽
Kitaek Kang
Keyword(s):
Raman Spectroscopy
◽
Local Stress
◽
Optical Surface
◽
Global And Local
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Global and Local Stress Characterization of SiN/Si(100) Wafers Using Optical Surface Profilometer and Multiwavelength Raman Spectroscopy
ECS Meeting Abstracts
◽
10.1149/ma2011-01/22/1374
◽
2011
◽
Keyword(s):
Raman Spectroscopy
◽
Local Stress
◽
Optical Surface
◽
Global And Local
Download Full-text
Optical surface profilometry of low reflectance materials – Evaluation as a laser processing diagnostic
Pacific International Conference on Applications of Lasers and Optics
◽
10.2351/1.5056972
◽
2006
◽
Cited By ~ 3
Author(s):
Adam M. Joyce
◽
Deborah M. Kane
◽
Richard J. Chater
Keyword(s):
Laser Processing
◽
Optical Surface
◽
Surface Profilometry
Download Full-text
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