Novel Surface-Wave-Excited Plasma-Enhanced CVD System with Reciprocating Substrate Motion

2019 ◽  
Vol 28 (15) ◽  
pp. 27-33 ◽  
Author(s):  
Kazufumi Azuma ◽  
Satoko Ueno ◽  
Masayasu Suzuki ◽  
Yoshiyuki Konishi ◽  
Shinichiro Ishida
Keyword(s):  
Surface Wave ◽  
Plasma Enhanced Cvd

Exit-surface wave reconstruction using a focal series

1992 ◽  
Vol 50 (2) ◽  
pp. 988-989
Author(s):  
W.J. de Ruijter ◽  
M.R. McCartney ◽  
David J. Smith ◽  
J.K. Weiss
Keyword(s):  
Surface Wave ◽  
Spherical Aberration ◽  
Data Extraction ◽  
High Sensitivity ◽  
Geometric Distortion ◽  
Variation Method ◽  
Objective Lens ◽  
Immediate Reconstruction ◽  
Exit Surface ◽  
Electron Microscopes

Further advances in resolution enhancement of transmission electron microscopes can be expected from digital processing of image data recorded with slow-scan CCD cameras. Image recording with these new cameras is essential because of their high sensitivity, extreme linearity and negligible geometric distortion. Furthermore, digital image acquisition allows for on-line processing which yields virtually immediate reconstruction results. At present, the most promising techniques for exit-surface wave reconstruction are electron holography and the recently proposed focal variation method. The latter method is based on image processing applied to a series of images recorded at equally spaced defocus.Exit-surface wave reconstruction using the focal variation method as proposed by Van Dyck and Op de Beeck proceeds in two stages. First, the complex image wave is retrieved by data extraction from a parabola situated in three-dimensional Fourier space. Then the objective lens spherical aberration, astigmatism and defocus are corrected by simply dividing the image wave by the wave aberration function calculated with the appropriate objective lens aberration coefficients which yields the exit-surface wave.

Surface Wave Utility in Composite Materia] Characterization

1989 ◽  
Vol 1 (1) ◽  
pp. 247-265
Author(s):  
Joseph Rose ◽  
Aleksander Pilarski ◽  
Yimei Huang
Keyword(s):  
Surface Wave

Analysis of focused surface wave transducers

1990 ◽  
Vol 137 (6) ◽  
pp. 467 ◽  
Author(s):  
M. Kirci ◽  
E. Akcakaya
Keyword(s):  
Surface Wave

Holey-plate structure surface-wave plasma source

1998 ◽  
Vol 08 (PR7) ◽  
pp. Pr7-195-Pr7-203
Author(s):  
Y. Yoshida
Keyword(s):  
Surface Wave ◽  
Plasma Source ◽  
Plate Structure ◽  
Structure Surface

ENHANCED SURFACE WAVE CONVOLVER USING A PIEZOELECTRIC SEMICONDUCTOR

1972 ◽  
Vol 33 (C6) ◽  
pp. C6-196-C6-201
Author(s):  
W. C. WANG ◽  
P. DAS
Keyword(s):  
Surface Wave ◽  
Piezoelectric Semiconductor ◽  
Enhanced Surface

Effect of Oxygen Radical in Hydrophilization Treatment of Polyimide using Ar-O2 Mixture Gas Surface Wave Plasma

2014 ◽  
Vol 134 (2) ◽  
pp. 91-97 ◽  
Author(s):  
Yoshinari Hirukawa ◽  
Shigeru Ono
Keyword(s):  
Surface Wave ◽  
Oxygen Radical ◽  
Effect Of Oxygen

Study of Inactivation Factors in Low Temperature Surface-wave Plasma Sterilization

2009 ◽  
Vol 129 (1) ◽  
pp. 30-34
Author(s):  
Mrityunjai Kumar Singh ◽  
Lei Xu ◽  
Akihisa Ogino ◽  
Masaaki Nagatsu
Keyword(s):  
Surface Wave ◽  
Low Temperature ◽  
Plasma Sterilization ◽  
Temperature Surface

Fabrication of Carbon Nanotube Triode Using Helicon Plasma Cvd with Electroplated Nico Catalyst

2003 ◽  
Vol 772 ◽  
Author(s):  
Masakazu Muroyama ◽  
Kazuto Kimura ◽  
Takao Yagi ◽  
Ichiro Saito
Keyword(s):  
Carbon Nanotubes ◽  
Carbon Nanotube ◽  
Metal Catalyst ◽  
Ni Catalyst ◽  
Plasma Cvd ◽  
Helicon Plasma ◽  
Plasma Enhanced Cvd ◽  
Turn On ◽  
Aligned Carbon Nanotubes ◽  
Vertically Aligned

AbstractA carbon nanotube triode using Helicon Plasma-enhanced CVD with electroplated NiCo catalyst has been successfully fabricated. Isolated NiCo based metal catalyst was deposited at the bottom of the cathode wells by electroplating methods to control the density of carbon nanotubes and also reduce the activation energy of its growth. Helicon Plasma-enhanced CVD (HPECVD) has been used to deposit nanotubes at 400°C. Vertically aligned carbon nanotubes were then grown selectively on the electroplated Ni catalyst. Field emission measurements were performed with a triode structure. At a cathode to anode gap of 1.1mm, the turn on voltage for the gate was 170V.

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