Precision Deep Reactive Ion Etching of Monocrystalline 4H-SiCOI for Bulk Acoustic Wave Resonators with Ultra-Low Dissipation

2021 ◽  
Vol 168 (1) ◽  
pp. 017512
Author(s):  
B. Hamelin ◽  
J. Yang ◽  
F. Ayazi
Keyword(s):  
Acoustic Wave ◽  
Reactive Ion Etching ◽  
Bulk Acoustic Wave ◽  
Ion Etching ◽  
Deep Reactive Ion Etching ◽  
Low Dissipation ◽  
Acoustic Wave Resonators ◽  
Bulk Acoustic Wave Resonators

scholarly journals All‐Epitaxial Bulk Acoustic Wave Resonators

2020 ◽  
Vol 217 (7) ◽  
pp. 1900786
Author(s):  
Jeffrey Miller ◽  
John Wright ◽  
Huili Grace Xing ◽  
Debdeep Jena
Keyword(s):  
Acoustic Wave ◽  
Bulk Acoustic Wave ◽  
Acoustic Wave Resonators ◽  
Bulk Acoustic Wave Resonators

scholarly journals Selective normal mode excitation in multilayer thin film bulk acoustic wave resonators

2014 ◽  
Vol 105 (16) ◽  
pp. 162910 ◽  
Author(s):  
Andrey Kozyrev ◽  
Anatoly Mikhailov ◽  
Sergey Ptashnik ◽  
Peter K. Petrov ◽  
Neil Alford
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Normal Mode ◽  
Bulk Acoustic Wave ◽  
Multilayer Thin Film ◽  
Mode Excitation ◽  
Film Bulk ◽  
Acoustic Wave Resonators ◽  
Bulk Acoustic Wave Resonators

scholarly journals Semi-insulating 4H-SiC lateral bulk acoustic wave resonators

2021 ◽  
Vol 118 (11) ◽  
pp. 114002
Author(s):  
B. Jiang ◽  
N. P. Opondo ◽  
S. A. Bhave
Keyword(s):  
Acoustic Wave ◽  
Bulk Acoustic Wave ◽  
Acoustic Wave Resonators ◽  
Bulk Acoustic Wave Resonators
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