Evaluation of the Impact of Abnormal Grains on the Performance of Sc0.15Al0.85N-based BAW Resonators and Filters

ScxAl1-xN is a promising piezoelectric material for radio frequency communication applications with excellent electro-acoustic properties. However, the growth of abnormally oriented grains is widely observed in the Sc doped AlN films deposited by sputtering. In this work, for the first time, the impact of the abnormal grains in the Sc0.15Al0.85N films on the performance of bulk acoustic wave resonators and filters is systematically evaluated by both simulations and measurements. The correlation between the device performance and the abnormal grain parameters, including the density, dimension, crystal orientation, growth height, and the total volume of the abnormal grains, is evaluated and quantified. Simulation results show that the total volume of all abnormal grains in the whole device is the most critical factor among the parameters. Abnormal grains with randomly distributed parameters and around 6% total volume of the film can degrade the effective coupling coefficient of the resonator from 13.6% to 11%, leading to a 10.6% decrement of the filter bandwidth. Wafer-level device characterizations and measurements are performed, and the results are consistent with the simulations. This study provides a practical method for predicting the performance of the resonators and filters with abnormal grains, and a guideline for film quality evaluation.

The Recent Progress of MEMS/NEMS Resonators

MEMS/NEMS resonators are widely studied in biological detection, physical sensing, and quantum coupling. This paper reviews the latest research progress of MEMS/NEMS resonators with different structures. The resonance performance, new test method, and manufacturing process of single or double-clamped resonators, and their applications in mass sensing, micromechanical thermal analysis, quantum detection, and oscillators are introduced in detail. The material properties, resonance mode, and application in different fields such as gyroscope of the hemispherical structure, microdisk structure, drum resonator are reviewed. Furthermore, the working principles and sensing methods of the surface acoustic wave and bulk acoustic wave resonators and their new applications such as humidity sensing and fast spin control are discussed. The structure and resonance performance of tuning forks are summarized. This article aims to classify resonators according to different structures and summarize the working principles, resonance performance, and applications.

Correlation of Electrical Properties and Acoustic Loss in Single Crystalline Lithium Niobate-Tantalate Solid Solutions at Elevated Temperatures

Electrical conductivity and acoustic loss Q−1 of single crystalline Li(Nb,Ta)O3 solid solutions (LNT) are studied as a function of temperature by means of impedance spectroscopy and resonant piezoelectric spectroscopy, respectively. For this purpose, bulk acoustic wave resonators with two different Nb/Ta ratios are investigated. The obtained results are compared to those previously reported for congruent LiNbO3. The temperature dependent electrical conductivity of LNT and LiNbO3 show similar behavior in air at high temperatures from 400 to 700 °C. Therefore, it is concluded that the dominant transport mechanism in LNT is the same as in LN, which is the Li transport via Li vacancies. Further, it is shown that losses in LNT strongly increase above about 500 °C, which is interpreted to originate from conductivity-related relaxation mechanism. Finally, it is shown that LNT bulk acoustic resonators exhibit significantly lower loss, comparing to that of LiNbO3.