Highly Sensitive Reentrant Cavity-Microstrip Patch Antenna Integrated Wireless Passive Pressure Sensor for High Temperature Applications

A novel reentrant cavity-microstrip patch antenna integrated wireless passive pressure sensor was proposed in this paper for high temperature applications. The reentrant cavity was analyzed from aspects of distributed model and equivalent lumped circuit model, on the basis of which an optimal sensor structure integrated with a rectangular microstrip patch antenna was proposed to better transmit/receive wireless signals. In this paper, the proposed sensor was fabricated with high temperature resistant alumina ceramic and silver metalization with weld sealing, and it was measured in a hermetic metal tank with nitrogen pressure loading. It was verified that the sensor was highly sensitive, keeping stable performance up to 300 kPa with an average sensitivity of 981.8 kHz/kPa at temperature 25°C, while, for high temperature measurement, the sensor can operate properly under pressure of 60–120 kPa in the temperature range of 25–300°C with maximum pressure sensitivity of 179.2 kHz/kPa. In practical application, the proposed sensor is used in a method called table lookup with a maximum error of 5.78%.

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A wireless passive pressure sensor based on aperture coupled microstrip patch antenna

Sensor Review ◽

10.1108/sr-05-2017-0076 ◽

2018 ◽

Vol 38 (2) ◽

pp. 156-162 ◽

Cited By ~ 2

Author(s):

YanJie Guo ◽

QiuLin Tan ◽

Fei Lu ◽

GuoZhu Wu ◽

Lei Zhang

Keyword(s):

High Temperature ◽

Pressure Sensor ◽

Patch Antenna ◽

Base Material ◽

Microstrip Patch Antenna ◽

Resistant Material ◽

Content Type ◽

Microstrip Patch ◽

Passive Pressure ◽

Sensor Structure

Purpose This paper aims to present a novel wireless passive pressure sensor based on an aperture coupled microstrip patch antenna embedded with an air cavity for pressure measurement. Design/methodology/approach In this paper, the sensitive membrane deformed when pressure was applied on the surface of the sensor and the relative permittivity of the mixed substrate changed, resulting in a change in the center frequency of the microstrip antenna. The size of the pressure sensor is determined by theoretical calculation and software simulation. Then, the sensor is fabricated separately as three layers using printed circuit board technology and glued together at last. The pressure test of the sensor is carried out in a sealed metal tank. Findings The extracted resonant frequency was found to monotonically shift from 2.219 to 1.974 GHz when the pressure varied from 0 to 300 kPa, leading to an average absolute sensitivity of 0.817 MHz/kPa. Research limitations/implications This pressure sensor proposed here is mainly to verify the feasibility of this wireless passive maneuvering structure, and when the base material of this structure is replaced with some high-temperature-resistant material, the sensor can be used to measure the pressure inside the aircraft engine. Originality/value The sensor structure proposed here can be used to test the pressure in a high-temperature environment when the base material is replaced with some high-temperature-resistant material.

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Flexible EGaIn Liquid Metal Microstrip Patch Antenna Based Pressure Sensor

10.1109/sensors47087.2021.9639625 ◽

2021 ◽

Author(s):

Sheikh Dobir Hossain ◽

Annatoma Arif ◽

Bhushan Lohani ◽

Robert C. Roberts

Keyword(s):

Liquid Metal ◽

Pressure Sensor ◽

Patch Antenna ◽

Microstrip Patch Antenna ◽

Microstrip Patch

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A Passive Pressure Sensor Fabricated by Post-Fire Metallization on Zirconia Ceramic for High-Temperature Applications

Micromachines ◽

10.3390/mi5040814 ◽

2014 ◽

Vol 5 (4) ◽

pp. 814-824 ◽

Cited By ~ 6

Author(s):

Tao Luo ◽

Qiulin Tan ◽

Liqiong Ding ◽

Tanyong Wei ◽

Chao Li ◽

...

Keyword(s):

High Temperature ◽

Pressure Sensor ◽

Zirconia Ceramic ◽

Passive Pressure ◽

Temperature Applications

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Construction Of A Piezoelectric-Based Resonance Ceramic Pressure Sensor Designed For High-Temperature Applications

Metrology and Measurement Systems ◽

10.1515/mms-2015-0034 ◽

2015 ◽

Vol 22 (3) ◽

pp. 331-340 ◽

Cited By ~ 4

Author(s):

Darko Belavič ◽

Andraž Bradeško ◽

Marina Santo Zarnik ◽

Tadej Rojac

Keyword(s):

High Temperature ◽

Resonance Frequency ◽

Pressure Sensor ◽

Applied Pressure ◽

Additional Element ◽

Ceramic Structure ◽

Piezoelectric Resonance ◽

Sensor Structure ◽

Natural Resonance Frequency ◽

Temperature Applications

Abstract In this work the design aspects of a piezoelectric-based resonance ceramic pressure sensor made using low-temperature co-fired ceramic (LTCC) technology and designed for high-temperature applications is presented. The basic pressure-sensor structure consists of a circular, edge-clamped, deformable diaphragm that is bonded to a ring, which is part of the rigid ceramic structure. The resonance pressure sensor has an additional element – a piezoelectric actuator – for stimulating oscillation of the diaphragm in the resonance-frequency mode. The natural resonance frequency is dependent on the diaphragm construction (i.e., its materials and geometry) and on the actuator. This resonance frequency then changes due to the static deflection of the diaphragm caused by the applied pressure. The frequency shift is used as the output signal of the piezoelectric resonance pressure sensor and makes it possible to measure the static pressure. The characteristics of the pressure sensor also depend on the temperature, i.e., the temperature affects both the ceramic structure (its material and geometry) and the properties of the actuator. This work is focused on the ceramic structure, while the actuator will be investigated later.

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