Monte Carlo Simulation of Scanning Electron Microscope Image of Sidewall Shape for Linewidth Measurement

2009 ◽  
Vol 9 (2) ◽  
pp. 1655-1658
Author(s):  
S. M. Xiao ◽  
Z. M. Zhang ◽  
H. M. Li ◽  
Z. J. Ding
Keyword(s):  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Scanning Electron Microscope Image ◽  
Microscope Image ◽  
Linewidth Measurement ◽  
Electron Microscope Image ◽  
Scanning Electron

Simulation of Scanning Electron Microscope Image for Trench Structures

1993 ◽  
Vol 32 (Part 1, No. 12B) ◽  
pp. 6281-6286 ◽  
Author(s):  
Masatoshi Kotera ◽  
Satoru Yamaguchi ◽  
Sachio Umegaki ◽  
Hiroshi Suga
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Scanning Electron Microscope Image ◽  
Microscope Image ◽  
Electron Microscope Image ◽  
Scanning Electron
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