Sharp High-Aspect-Ratio AFM Tips Fabricated by a Combination of Deep Reactive Ion Etching and Focused Ion Beam Techniques

2010 ◽  
Vol 10 (1) ◽  
pp. 497-501 ◽  
Author(s):  
David Caballero ◽  
Guillermo Villanueva ◽  
Jose Antonio Plaza ◽  
Christopher A. Mills ◽  
Josep Samitier ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Deep Reactive Ion Etching ◽  
Afm Tips

Deep reactive ion etching of sub-micrometer trenches with ultra high aspect ratio

2014 ◽  
Vol 113 ◽  
pp. 35-39 ◽  
Author(s):  
Jayalakshmi Parasuraman ◽  
Anand Summanwar ◽  
Frédéric Marty ◽  
Philippe Basset ◽  
Dan E. Angelescu ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Deep Reactive Ion Etching

Deep reactive ion etching and focused ion beam combination for nanotip fabrication

2006 ◽  
Vol 26 (2-3) ◽  
pp. 164-168 ◽  
Author(s):  
G. Villanueva ◽  
J.A. Plaza ◽  
A. Sánchez-Amores ◽  
J. Bausells ◽  
E. Martínez ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Deep Reactive Ion Etching ◽  
Beam Combination

Antistick Postpassivation of High-Aspect Ratio Silicon Molds Fabricated by Deep-Reactive Ion Etching

2006 ◽  
Vol 15 (1) ◽  
pp. 84-93 ◽  
Author(s):  
J.X. Gao ◽  
L.P. Yeo ◽  
M.B. Chan-Park ◽  
J.M. Miao ◽  
Y.H. Yan ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Deep Reactive Ion Etching

SiC Wafer Bonding and Deep Reactive Ion Etching Towards High-Aspect Ratio SiC MEMS Fabrication

2018 ◽  
Vol 86 (5) ◽  
pp. 105-110 ◽  
Author(s):  
Lunet E Luna ◽  
Karl D. Hobart ◽  
Marko J Tadjer ◽  
Rachael L. Myers-Ward ◽  
Travis J. Anderson ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
Wafer Bonding ◽  
High Aspect Ratio ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Deep Reactive Ion Etching ◽  
Mems Fabrication ◽  
Sic Wafer

Ultra-high aspect ratio replaceable AFM tips using deformation-suppressed focused ion beam milling

2013 ◽  
Vol 24 (46) ◽  
pp. 465701 ◽  
Author(s):  
Alexey Savenko ◽  
Izzet Yildiz ◽  
Dirch Hjorth Petersen ◽  
Peter Bøggild ◽  
Malte Bartenwerfer ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Afm Tips ◽  
Focused Ion Beam Milling
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