Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three-dimensional micro- and nanostructures
2005 ◽
Vol 36
(7)
◽
pp. 673-677
◽
Keyword(s):
2014 ◽
Vol 113
◽
pp. 35-39
◽
Keyword(s):
Keyword(s):
2018 ◽
Vol 27
(4)
◽
pp. 686-697
◽
Keyword(s):
2017 ◽
Vol 9
(12)
◽
pp. 168781401773815
◽
Antistick Postpassivation of High-Aspect Ratio Silicon Molds Fabricated by Deep-Reactive Ion Etching
2006 ◽
Vol 15
(1)
◽
pp. 84-93
◽
Keyword(s):
Keyword(s):
Keyword(s):