silicon micromachining
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Silicon Micromachining for Submillimeter

2021 ◽  
pp. 255-278
Author(s):  
A. Karmakar ◽  
B. Biswas ◽  
M.K. Hooda
Keyword(s):  
Silicon Micromachining

Isolation Enhancement for W-Band Coplanar Array Antennas Based on Silicon Micromachining Technology

2020 ◽  
Vol 19 (10) ◽  
pp. 1744-1748
Author(s):  
Shi Sen Yao ◽  
Yu Jian Cheng ◽  
Ya Fei Wu ◽  
Yong Fan
Keyword(s):  
Array Antennas ◽  
W Band ◽  
Silicon Micromachining

scholarly journals Fabrication of a MEMS Micromirror Based on Bulk Silicon Micromachining Combined With Grayscale Lithography

2020 ◽  
Vol 29 (5) ◽  
pp. 734-740
Author(s):  
Ines S. Garcia ◽  
Carlos Ferreira ◽  
Joana D. Santos ◽  
Marco Martins ◽  
Rosana A. Dias ◽  
...  
Keyword(s):  
Bulk Silicon ◽  
Silicon Micromachining

scholarly journals A Low-Profile and High-Gain Frequency Beam Steering Subterahertz Antenna Enabled by Silicon Micromachining

2020 ◽  
Vol 68 (2) ◽  
pp. 672-682 ◽  
Author(s):  
Adrian Gomez-Torrent ◽  
Maria Garcia-Vigueras ◽  
Laurent Le Coq ◽  
Adham Mahmoud ◽  
Mauro Ettorre ◽  
...  
Keyword(s):  
Beam Steering ◽  
High Gain ◽  
Low Profile ◽  
Silicon Micromachining

Silicon micromachining with nanometer-thin boron masking and membrane material

2019 ◽  
Vol 6 (11) ◽  
pp. 116438
Author(s):  
Xingyu Liu ◽  
Joe Italiano ◽  
Robin Scott ◽  
Lis K Nanver
Keyword(s):  
Membrane Material ◽  
Silicon Micromachining
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