Characteristics of Nitrogen Doped Diamond-Like Carbon Films Prepared by Unbalanced Magnetron Sputtering for Electronic Devices

2016 ◽  
Vol 16 (5) ◽  
pp. 4893-4896 ◽  
Author(s):  
Jaehyeong Lee ◽  
Byung Hui Choi ◽  
Jung-Hyun Yun ◽  
Yong Seob Park
Keyword(s):  
Magnetron Sputtering ◽  
Electronic Devices ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Nitrogen Doped ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron

scholarly journals Investigation of diamond-like-carbon films prepared by unbalanced magnetron sputtering

2005 ◽  
Vol 54 (10) ◽  
pp. 4944
Author(s):  
Yang Wu-Bao ◽  
Fan Song-Hua ◽  
Zhang Gu-Ling ◽  
Ma Pei-Ning ◽  
Zhang Shou-Zhong ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron

Effect of step biasing on diamond-like carbon films deposited by pulsed unbalanced magnetron sputtering

2013 ◽  
Vol 210 (9) ◽  
pp. 1874-1880 ◽  
Author(s):  
Haiyang Dai ◽  
Zhenping Chen ◽  
Renzhong Xue ◽  
Tao Li ◽  
Yuncai Xue
Keyword(s):  
Magnetron Sputtering ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron
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