OS6(1)-1(OS06W0384) Young's Modulus Measurement of Polysilicon Thin Film Using Thin Film Tensile Tester Equipped with Electrostatic Force Grip
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2003 ◽
Vol 2003.2
(0)
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pp. _OS06W0384-_OS06W0384
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2006 ◽
Vol 16
(10)
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pp. 1926-1934
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2013 ◽
Vol 52
(11R)
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pp. 110111
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2017 ◽
Vol 142
(6)
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pp. 3436-3442
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2017 ◽
Vol 94
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pp. 248-252
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2002 ◽
Vol 112
(5)
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pp. 2408-2408