OS06W0384 Young's modulus measurement of polysilicon thin film using thin film tensile tester equipped with electrostatic force grip

2003 ◽  
Vol 2003.2 (0) ◽  
pp. _OS06W0384-_OS06W0384
Author(s):  
Toshiyuki Tsuchiya ◽  
Hirofumi Funabashi
Keyword(s):  
Thin Film ◽  
Young’S Modulus ◽  
Young's Modulus ◽  
Electrostatic Force ◽  
Tensile Tester ◽  
Modulus Measurement ◽  
Young’S Modulus Measurement

Young's modulus measurement of thin-film materials using micro-cantilevers

2006 ◽  
Vol 16 (10) ◽  
pp. 1926-1934 ◽  
Author(s):  
G J McShane ◽  
M Boutchich ◽  
A Srikantha Phani ◽  
D F Moore ◽  
T J Lu
Keyword(s):  
Thin Film ◽  
Young’S Modulus ◽  
Young's Modulus ◽  
Modulus Measurement ◽  
Young’S Modulus Measurement

Effective Young's Modulus Measurement of Thin Film Using Micromechanical Cantilever Sensors

2013 ◽  
Vol 52 (11R) ◽  
pp. 110111 ◽  
Author(s):  
Akiko N. Itakura ◽  
Masaya Toda ◽  
Koji Miyake ◽  
Renate Förch ◽  
Rüdiger Berger
Keyword(s):  
Thin Film ◽  
Young’S Modulus ◽  
Young's Modulus ◽  
Cantilever Sensors ◽  
Modulus Measurement ◽  
Young’S Modulus Measurement

Young’s modulus measurement based on surface plasmon resonance

2017 ◽  
Vol 94 ◽  
pp. 248-252 ◽  
Author(s):  
Ali Lotfalian ◽  
Ali Jandaghian ◽  
Hossein Saghafifar ◽  
Ezzedin Mohajerani
Keyword(s):  
Surface Plasmon Resonance ◽  
Young’S Modulus ◽  
Surface Plasmon ◽  
Plasmon Resonance ◽  
Young's Modulus ◽  
Modulus Measurement ◽  
Young’S Modulus Measurement

Note on an apparatus for Young’s modulus measurement

1987 ◽  
Vol 55 (7) ◽  
pp. 664-665 ◽  
Author(s):  
J. Flores‐Maldonado ◽  
S. Galindo ◽  
H. Jiménez‐Domínguez
Keyword(s):  
Young’S Modulus ◽  
Young's Modulus ◽  
Modulus Measurement ◽  
Young’S Modulus Measurement
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