scholarly journals An Active Micro Vibration Isolator with Zero-Power Controlled Magnetic Suspension Technology

2006 ◽  
Vol 49 (3) ◽  
pp. 719-726 ◽  
Author(s):  
Md. Emdadul HOQUE ◽  
Masaya TAKASAKI ◽  
Yuji ISHINO ◽  
Hirohisa SUZUKI ◽  
Takeshi MIZUNO
2014 ◽  
Vol 494-495 ◽  
pp. 491-496
Author(s):  
Hua Ping Mei ◽  
Hao Yue Tian ◽  
Shuan Huang

The vibration isolators have witnessed significant developments due to pressing demands for high resolution metrology and manufacturing, optical, physical and chemical experiments. In the view of these requirements, the engineers and physicists have exploited different types of vibration isolators. This paper firstly presents the recent developments on the passive vibration isolators. It finds that the passive vibration isolators can constrain the high frequency oscillation. The active control is the efficient method to cancel the low frequency vibration. Then, the paper is concerned with the recent advances on the active vibration isolator. The appropriate actuator, sensor and advanced control method are the key component of the active vibration isolator to enhance their vibration isolation properties. Finally, the author proposes that the magnetic suspension vibration isolator is a future research direction in the field of the vibration isolation.


2012 ◽  
Vol 586 ◽  
pp. 328-336
Author(s):  
Qiang Li ◽  
Deng Feng Xu ◽  
Jin Chun Hu ◽  
Liu Hao

Magnetic suspension vibration isolators have attracted significant attention in the field of semiconductor industry and high precision equipments. However, it is impossible to levitate an object by only permanent magnet due to instability of permanent magnets. It needs a guide device or active control to hold the magnetic suspension passive vibration isolator (MSPVI) at equilibrium position. In order to overcome the instability of the permanent magnets, the linear bearing, rubber O-ring and rubber membrane are applied in the MSPVI. The transmissibility of the MSPVI was calculated and subsequently measured. The experimental results show that the MSPVI can achieve low natural frequency with the help of the rubber membrane which is superior to the linear bearing and o-ring. Beside, the vibration isolating performance of the MSPVI is measured. The experimental results reveal that the MSPVI achieves the lowest resonant frequency when the load capacity of the MSPVI reaches maximum value.


2017 ◽  
Vol 25 (9) ◽  
pp. 2448-2453
Author(s):  
刘兴天 LIU Xing-tian ◽  
孔祥森 KONG Xiang-sen ◽  
申军烽 SHEN Jun-feng ◽  
周徐斌 ZHOU Xu-bin

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