29pm2-F-3 Piezoresistive effect of p-type silicon nanowires fabricated by a top-down process using FIB implantation and wet etching

2015 ◽  
Vol 2015.7 (0) ◽  
pp. _29pm2-F-3-_29pm2-F-3
Author(s):  
Takahiro Kozeki ◽  
Hoang-Phuong Phan ◽  
Dzung Viet Dao ◽  
Shozo Inoue ◽  
Takahiro Namazu
Keyword(s):  
Silicon Nanowires ◽  
Wet Etching ◽  
Top Down ◽  
Piezoresistive Effect ◽  
Type Silicon ◽  
P Type

scholarly journals Piezoresistive effect of p-type silicon nanowires fabricated by a top-down process using FIB implantation and wet etching

RSC Advances ◽  
2015 ◽  
Vol 5 (100) ◽  
pp. 82121-82126 ◽  
Author(s):  
Hoang-Phuong Phan ◽  
Takahiro Kozeki ◽  
Toan Dinh ◽  
Tatsuya Fujii ◽  
Afzaal Qamar ◽  
...  
Keyword(s):  
Silicon Nanowires ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Wet Etching ◽  
Top Down ◽  
Piezoresistive Effect ◽  
Type Silicon ◽  
Mechanical Sensors ◽  
P Type

This work reports the piezoresistance of silicon nanowires fabricated using focused ion beam and wet etching for NEMS mechanical sensors.

scholarly journals Thermal and electromechanical characterization of top-down fabricated p-type silicon nanowires

2015 ◽  
Vol 6 (2) ◽  
pp. 025001 ◽  
Author(s):  
Alain Bosseboeuf ◽  
Pierre Etienne Allain ◽  
Fabien Parrain ◽  
Xavier Le Roux ◽  
Nathalie Isac ◽  
...  
Keyword(s):  
Silicon Nanowires ◽  
Top Down ◽  
Type Silicon ◽  
P Type ◽  
Electromechanical Characterization

scholarly journals Top-down Fabrication of Silicon Nanowires Using Thermal Oxidation and Wet Etching for Inertial Sensor Applications

2018 ◽  
Vol 30 (8) ◽  
pp. 1891 ◽  
Author(s):  
Seohyeong Jang ◽  
Hun Lee ◽  
Joon Yoon Shin ◽  
Hyung Jung Yoo ◽  
Dong-il "Dan" Cho
Keyword(s):  
Thermal Oxidation ◽  
Silicon Nanowires ◽  
Inertial Sensor ◽  
Wet Etching ◽  
Top Down ◽  
Sensor Applications

Enhancement of Photoelectrochemical Hydrogen Evolution of P-Type Silicon Nanowires Array by Loading MoS2

Silicon ◽  
2018 ◽  
Vol 11 (4) ◽  
pp. 1963-1970
Author(s):  
Lei Qiao ◽  
Mingjia Liao ◽  
Kaiwei Fang ◽  
Xiaolan He ◽  
Yunhuai Zhang
Keyword(s):  
Hydrogen Evolution ◽  
Silicon Nanowires ◽  
Type Silicon ◽  
P Type ◽  
Nanowires Array

Correlation between the performance and microstructure of Ti/Al/Ti/Au Ohmic contacts to p-type silicon nanowires

2011 ◽  
Vol 22 (7) ◽  
pp. 075206 ◽  
Author(s):  
Abhishek Motayed ◽  
John E Bonevich ◽  
Sergiy Krylyuk ◽  
Albert V Davydov ◽  
Geetha Aluri ◽  
...  
Keyword(s):  
Silicon Nanowires ◽  
Ohmic Contacts ◽  
Type Silicon ◽  
P Type
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