Online Measurement Technique of Melt Surface Level Using Fusion Ring Image in Growth Furnace of Czochralski Method for Si Crystal
2008 ◽
Vol 74
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pp. 1562-1568
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2007 ◽
Vol 73
(735)
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pp. 2976-2981
2007 ◽
Vol 73
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pp. 649-654
1990 ◽
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pp. 562-563
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Vol 65
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pp. 1439-1451