One-Dimensional Analysis of Polarization Reversal Relating to Electron Cyclotron Resonance

2007 ◽  
Vol 51 (2T) ◽  
pp. 313-315
Author(s):  
K. Takahashi ◽  
A. Fukuyama ◽  
T. Kaneko ◽  
R. Hatakeyama
Keyword(s):  
Dimensional Analysis ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Polarization Reversal ◽  
One Dimensional

One-dimensional hybrid modeling and simulation of electron cyclotron resonance discharge

1995 ◽  
Vol 23 (4) ◽  
pp. 617-622 ◽  
Author(s):  
Nak-Heon Choi ◽  
Wook-Hee Koh ◽  
N.S. Yoon ◽  
Hyoung-Bin Park ◽  
Duk-In Choi
Keyword(s):  
Modeling And Simulation ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Hybrid Modeling ◽  
One Dimensional

A one-dimensional axial electron cyclotron resonance source model

2000 ◽  
Vol 71 (2) ◽  
pp. 666-668 ◽  
Author(s):  
D. H. Edgell ◽  
J. S. Kim ◽  
S. K. Wong ◽  
R. C. Pardo ◽  
R. Vondrasek
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Source Model ◽  
Electron Cyclotron ◽  
One Dimensional

Electron cyclotron resonance ion source one-dimensional fluid modeling

2002 ◽  
Vol 73 (2) ◽  
pp. 641-643 ◽  
Author(s):  
Dana H. Edgell ◽  
Jin-Soo Kim ◽  
Ioan N. Bogatu ◽  
Richard C. Pardo ◽  
Richard C. Vondrasek
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Ion Source ◽  
Electron Cyclotron ◽  
One Dimensional ◽  
Fluid Modeling

Anisotropic electron cyclotron resonance etching of tungsten films on GaAs

1994 ◽  
Vol 30 (1) ◽  
pp. 84-85 ◽  
Author(s):  
R.J. Shul ◽  
D.J. Rieger ◽  
C. Constantine ◽  
A.G. Baca ◽  
C. Barratt
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron
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