Phase-only Spatial Light Modulator (SLM) is one of the most widely used devices for phase modulation. It has been successfully applied in the field with requirements of precision phase modulation such as holographic display, optical tweezers, lithography, etc. However, due to the limitations in the manufacturing process, the grayscale-phase response could be different for every single SLM device, even varying on sections of an SLM panel. A diverse array of calibration methods have been proposed and could be sorted into two categories: the interferometric phase calibration methods and the diffractive phase calibration methods. The principles of phase-only SLM are introduced. The main phase calibration methods are discussed and reviewed. The advantages of these methods are analyzed and compared. The potential methods for different applications are suggested.
Phase calibration of spatial light modulators by means of Fresnel images
