Numerical calculation method of modulation transfer function for preproximity focusing electron-optical system

2013 ◽  
Vol 52 (8) ◽  
pp. 1641 ◽  
Author(s):  
Ling Ren ◽  
Feng Shi ◽  
Hui Guo ◽  
Honggang Wang ◽  
Benkang Chang
2020 ◽  
Vol 68 (3) ◽  
pp. 572-597
Author(s):  
Nedeljko Pađen ◽  
Dragana Perić ◽  
Branko Livada ◽  
Milan Milosavljević

2011 ◽  
Vol 31 (8) ◽  
pp. 0812008
Author(s):  
段亚轩 Duan Yaxuan ◽  
陈永权 Chen Yongquan ◽  
赵建科 Zhao Jianke ◽  
李坤 Li Kun ◽  
龙江波 Long Jiangbo

2009 ◽  
Vol 33 (3) ◽  
pp. 429-442 ◽  
Author(s):  
Kuo-Hwa Tseng ◽  
Chieh Kung ◽  
Te-Tan Liao ◽  
Hao-Peng Chang

The resolution and performance of an optical system can be characterized by a quantity known as the modulation transfer function (MTF), which is a measurement of an optical system’s ability to transfer contrast from the specimen to the intermediate image plane at a specific resolution. Accordingly, this study employs skew ray tracing based on a 4 × 4 homogeneous coordinate transformation matrix and Snell’s law to develop a detailed methodology for determining the spot diagram on the image plane when light rays pass through the optical system. And the authors present calculations of the MTF of an optical system by using the spot diagram on the image plane. The numerical results of the proposed methodology are demonstrated using a symmetrical optical system.


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