Application of laser-induced breakdown spectroscopy for real-time detection of contamination particles during the manufacturing process

2018 ◽  
Vol 57 (12) ◽  
pp. 3288 ◽  
Author(s):  
Haebum Lee ◽  
Hyunok Maeng ◽  
Kyoungtae Kim ◽  
Gibaek Kim ◽  
Kihong Park
1998 ◽  
Vol 70 (6) ◽  
pp. 1186-1191 ◽  
Author(s):  
Cynthia K. Williamson ◽  
Robert G. Daniel ◽  
Kevin L. McNesby ◽  
Andrzej W. Miziolek

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