Solid-State-Laser-Produced Microdroplet-Tin Plasma Sources of Extreme Ultraviolet Radiation

2020 ◽  
Author(s):  
L. Behnke ◽  
R. Schupp ◽  
Z. Bouza ◽  
J. Scheers ◽  
J. Sheil ◽  
...  
Keyword(s):  
Solid State ◽  
Ultraviolet Radiation ◽  
Extreme Ultraviolet ◽  
Solid State Laser ◽  
Plasma Sources ◽  
State Laser ◽  
Tin Plasma ◽  
Extreme Ultraviolet Radiation

Physics of Laser-Produced Plasma Sources of Extreme Ultraviolet Radiation

2018 ◽  
Author(s):  
Oscar Versolato ◽  
Dmitry Kurilovich ◽  
Francesco Torretti ◽  
Ruben Schupp ◽  
Joris Scheers ◽  
...  
Keyword(s):  
Ultraviolet Radiation ◽  
Extreme Ultraviolet ◽  
Plasma Sources ◽  
Laser Produced Plasma ◽  
Extreme Ultraviolet Radiation

scholarly journals Errata: RZLINE code modeling of distributed tin targets for laser-produced plasma sources of extreme ultraviolet radiation

2012 ◽  
Vol 11 (2) ◽  
pp. 029802-1 ◽  
Author(s):  
Konstantin N. Koshelev ◽  
Vladimir V. Ivanov ◽  
Vladimir G. Novikov ◽  
Viacheslav Medvedev ◽  
Alexander S. Grushin ◽  
...  
Keyword(s):  
Ultraviolet Radiation ◽  
Extreme Ultraviolet ◽  
Plasma Sources ◽  
Laser Produced Plasma ◽  
Extreme Ultraviolet Radiation

RZLINE code modeling of distributed tin targets for laser-produced plasma sources of extreme ultraviolet radiation

2012 ◽  
Vol 11 (2) ◽  
pp. 021112-1 ◽  
Author(s):  
Konstantin N. Koshelev ◽  
Vladimir V. Ivanov ◽  
Vladimir G. Novikov ◽  
Viacheslav Medvedev ◽  
Alexander S. Grushin ◽  
...  
Keyword(s):  
Ultraviolet Radiation ◽  
Extreme Ultraviolet ◽  
Plasma Sources ◽  
Laser Produced Plasma ◽  
Extreme Ultraviolet Radiation

All solid state laser source for tunable blue and ultraviolet radiation

1995 ◽  
Vol 66 (18) ◽  
pp. 2318-2320 ◽  
Author(s):  
C. Zimmermann ◽  
V. Vuletic ◽  
A. Hemmerich ◽  
T. W. Hänsch
Keyword(s):  
Solid State ◽  
Ultraviolet Radiation ◽  
Solid State Laser ◽  
Laser Source ◽  
State Laser

Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection

2018 ◽  
Vol 189 (03) ◽  
pp. 323-334 ◽  
Author(s):  
D.B. Abramenko ◽  
P.S. Antsiferov ◽  
D.I. Astakhov ◽  
Aleksandr Yu. Vinokhodov ◽  
Il'ya Yu. Vichev ◽  
...  
Keyword(s):  
Ultraviolet Radiation ◽  
Extreme Ultraviolet ◽  
Mask Inspection ◽  
Extreme Ultraviolet Radiation
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