High-speed analysis of spectroscopic ellipsometry data using deep learning methods

2021 ◽  
Author(s):  
Yifei Li ◽  
Yifeng Wu ◽  
Heshan Yu ◽  
Ichiro Takeuchi ◽  
Rafael Jaramillo
Keyword(s):  
Deep Learning ◽  
Spectroscopic Ellipsometry ◽  
High Speed ◽  
Learning Methods ◽  
High Speed Analysis ◽  
Ellipsometry Data ◽  
Spectroscopic Ellipsometry Data

scholarly journals Deep Learning for Rapid Analysis of Spectroscopic Ellipsometry Data

2021 ◽  
pp. 2100147
Author(s):  
Yifei Li ◽  
Yifeng Wu ◽  
Heshan Yu ◽  
Ichiro Takeuchi ◽  
Rafael Jaramillo
Keyword(s):  
Deep Learning ◽  
Spectroscopic Ellipsometry ◽  
Rapid Analysis ◽  
Ellipsometry Data ◽  
Spectroscopic Ellipsometry Data
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