scholarly journals Optical ridge waveguides preserving the thermo-optic features in LiNbO_3 crystals fabricated by combination of proton implantation and selective wet etching

2010 ◽  
Vol 18 (11) ◽  
pp. 11444 ◽  
Author(s):  
Yang Tan ◽  
Feng Chen
Keyword(s):  
Wet Etching ◽  
Ridge Waveguides ◽  
Proton Implantation

Ridge waveguides in magneto-optical glasses formed by combination of proton implantation and precise diamond blade dicing

2019 ◽  
Vol 58 (05) ◽  
pp. 1
Author(s):  
Qi-Feng Zhu ◽  
Xue-Wen Long ◽  
Yue Wang ◽  
Xiao-Liang Shen ◽  
Hai-Tao Guo ◽  
...  
Keyword(s):  
Optical Glasses ◽  
Diamond Blade ◽  
Ridge Waveguides ◽  
Proton Implantation

Planar and ridge waveguides formed by proton implantation and femtosecond laser ablation in fused silica

Vacuum ◽  
2020 ◽  
Vol 172 ◽  
pp. 109093 ◽  
Author(s):  
Jie Zhang ◽  
Yue Zhang ◽  
Jun Xu ◽  
She-Bao Lin ◽  
Chun-Xiao Liu
Keyword(s):  
Laser Ablation ◽  
Femtosecond Laser ◽  
Femtosecond Laser Ablation ◽  
Fused Silica ◽  
Ridge Waveguides ◽  
Proton Implantation

Lithium niobate ridge waveguides by nickel diffusion and proton-exchanged wet etching

1995 ◽  
Vol 7 (11) ◽  
pp. 1318-1320 ◽  
Author(s):  
Wei-Lin Chen ◽  
Rei-Shin Chen ◽  
Jeng Hong Lee ◽  
Way-Seen Wang
Keyword(s):  
Lithium Niobate ◽  
Wet Etching ◽  
Ridge Waveguides

Lithium niobate ridge waveguides fabricated by wet etching

1995 ◽  
Vol 31 (4) ◽  
pp. 268-269 ◽  
Author(s):  
H.J. Lee ◽  
S.-Y. Shin
Keyword(s):  
Lithium Niobate ◽  
Wet Etching ◽  
Ridge Waveguides

Lithium Niobate Ridge Waveguides Fabricated by Wet Etching

2007 ◽  
Vol 19 (6) ◽  
pp. 417-419 ◽  
Author(s):  
H. Hu ◽  
R. Ricken ◽  
W. Sohler ◽  
R. B. Wehrspohn
Keyword(s):  
Lithium Niobate ◽  
Wet Etching ◽  
Ridge Waveguides

Planar and ridge waveguides in Yb3+-doped silicate glasses fabricated by proton implantation and precise diamond blade dicing

2019 ◽  
Vol 453 ◽  
pp. 124344
Author(s):  
Jie Zhang ◽  
Wen-Tao Guo ◽  
Chen-Yang Tang ◽  
Sen Yan ◽  
Wei-Nan Li ◽  
...  
Keyword(s):  
Silicate Glasses ◽  
Diamond Blade ◽  
Ridge Waveguides ◽  
Proton Implantation

Magnetron Dry Etching for Photonic Device Fabrication

1993 ◽  
Vol 300 ◽  
Author(s):  
H. E. G. Arnot ◽  
H. P. Zappe ◽  
J. E. Epler ◽  
B. Graf ◽  
R. Widmer ◽  
...  
Keyword(s):  
Etch Rate ◽  
Dry Etching ◽  
Device Fabrication ◽  
Wet Etching ◽  
Optical Losses ◽  
Phase Modulators ◽  
Optimum Parameters ◽  
Ridge Waveguides ◽  
Fabry Perot ◽  
Ridge Lasers

ABSTRACTMagnetron dry etching using SiCl4, combined with a smooth reflowed photoresist masking technique has been used to fabricate GaAs/AlGaAs ridge waveguides. The effect of pressure, flowrate and power on etch rate and sidewall smoothness has been studied. Waveguides fabricated using optimum parameters exhibited optical losses lower than those achievable using wet etching. This process was further used in the fabrication of Fabry Perot ridge lasers, detectors and phase modulators.

Effect of pre-annealing process on the surface roughness of ridge waveguides formed with wet etching of –Z-cut LiNbO3

2016 ◽  
Vol 496 (1) ◽  
pp. 143-148 ◽  
Author(s):  
U. O. Salgaeva ◽  
S. S. Mushinsky ◽  
A. B. Volyncev ◽  
I. S. Azanova ◽  
D. I. Shevtsov
Keyword(s):  
Surface Roughness ◽  
Annealing Process ◽  
Wet Etching ◽  
Ridge Waveguides

Progress in laser-induced backside wet etching

2010 ◽  
Author(s):  
Hiroyuki Niino ◽  
Tadatake Sato ◽  
Yoshizo Kawaguchi ◽  
Aiko Narazaki ◽  
Ryozo Kurosaki
Keyword(s):  
Wet Etching
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