Development of rare earth doped silica fibre fabrication using MCVD furnace chelate vapor phase delivery is presented. In this study, erbium and aluminium is used as the dopant with precursor erbium (III) tris (2,2,6,6-tetramethyl-3,5-heptanedionate) and aluminium chloride respectively. The preform was designed for 10 layers of SiO2-P2O3doped silica (clad structure) and 5 layers of SiO2-Al2O3-Er2O3(core structure). Preform is analysed for the properties of layer structure i.e. refractive index profile using preform index profiler and EPMA (SEM-EDX) for dopant distribution. Results show good longitudinal uniformity despite condensation of metal organic precursor during the fabrication process. Maximum incorporation of Er2O3is about 0.1 mole % with 1.5 mole% of Al2O3in the core.