Negative Ion Energy Distributions in Reactive HiPIMS of Ti and Nb in an Ar/O2 Atmosphere

2013 ◽  
Author(s):  
M. Bowes ◽  
P. Poolcharuansin ◽  
J.W. Bradley
Keyword(s):  
Negative Ion ◽  
Energy Distributions ◽  
Ion Energy ◽  
Ion Energy Distributions

Negative ion energy distributions in reactive HiPIMS

2012 ◽  
Vol 46 (4) ◽  
pp. 045204 ◽  
Author(s):  
M Bowes ◽  
P Poolcharuansin ◽  
J W Bradley
Keyword(s):  
Negative Ion ◽  
Energy Distributions ◽  
Ion Energy ◽  
Ion Energy Distributions

Use of Zr? secondary ion energy distributions and factor analysis to construct chemical-state depth profiles in SIMS

1995 ◽  
Vol 23 (9) ◽  
pp. 573-580 ◽  
Author(s):  
S. J. Splinter ◽  
P. A. W. van der Heide ◽  
A. Lin ◽  
N. S. McIntyre
Keyword(s):  
Factor Analysis ◽  
Chemical State ◽  
Energy Distributions ◽  
Ion Energy ◽  
Depth Profiles ◽  
Ion Energy Distributions ◽  
Secondary Ion

Ion energy distributions in rf sheaths; review, analysis and simulation

1999 ◽  
Vol 8 (3) ◽  
pp. R45-R64 ◽  
Author(s):  
E Kawamura ◽  
V Vahedi ◽  
M A Lieberman ◽  
C K Birdsall
Keyword(s):  
Energy Distributions ◽  
Ion Energy ◽  
Review Analysis ◽  
Ion Energy Distributions

scholarly journals Ponderomotive force and ion energy distributions in an rf sheath

1992 ◽  
Vol 68 (1) ◽  
pp. 44-47 ◽  
Author(s):  
S. Hamaguchi ◽  
R. T. Farouki ◽  
M. Dalvie
Keyword(s):  
Ponderomotive Force ◽  
Energy Distributions ◽  
Ion Energy ◽  
Ion Energy Distributions
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