Ion energy distributions and their evolution during bias-enhanced nucleation of chemical vapor deposition of diamond
2000 ◽
Vol 9
(3-6)
◽
pp. 317-321
◽
Keyword(s):
Keyword(s):
Critical ion energy and ion flux in the growth of films by plasma‐enhanced chemical‐vapor deposition
1994 ◽
Vol 12
(4)
◽
pp. 1360-1364
◽
Keyword(s):
1995 ◽
Vol 53
◽
pp. 256-257
Keyword(s):
1989 ◽
Vol 47
◽
pp. 608-609