Investigation of polishing parameters and slurry composition on germanium chemical mechanical planarisation using response surface methodology

2021 ◽  
Vol 62 (4) ◽  
pp. 263
Author(s):  
Apeksha Gupta ◽  
Karthik Shathiri ◽  
Vidyasagar Shilapuram ◽  
Manivannan Ramachandran
Author(s):  
Abrar Muslim ◽  
Marwan Marwan ◽  
Ramli Saifullah ◽  
Muhammad Yahya Azwar ◽  
Darmadi Darmadi ◽  
...  

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