Al-2.18 Chemical Amplification (In Lithography)

2021 ◽  
Author(s):  
Richard G. Jones ◽  
Christopher K. Ober ◽  
Teruaki Hayakawa ◽  
Christine K. Luscombe ◽  
Natalie Stingelin
Keyword(s):  
Chemical Amplification

scholarly journals Environmentally stable chemical amplification positive resist: principle, chemistry, contamination resistance, and lithographic feasibility.

1994 ◽  
Vol 7 (3) ◽  
pp. 433-447 ◽  
Author(s):  
Hiroshi ITO ◽  
Greg BREYTA ◽  
Don HOFER ◽  
R. SOORIYAKUMARAN ◽  
Karen PETRILLO ◽  
...  
Keyword(s):  
Chemical Amplification ◽  
Stable Chemical ◽  
Positive Resist

Chemical amplification & dissolution inhibition: a novel high performance positive tone deep UV resist.

1992 ◽  
Vol 5 (1) ◽  
pp. 55-66 ◽  
Author(s):  
GEORG PAWLOWSKI ◽  
KLAUS-JÜRGEN PRZYBILLA ◽  
WALTER SPIESS ◽  
HORST WENGENROTH ◽  
HORST RÖSCHERT
Keyword(s):  
High Performance ◽  
Chemical Amplification ◽  
Deep Uv

Reversible integrated optic evanescent field biosensor using chemical amplification for added sensitivity

1998 ◽  
Author(s):  
Daniel P. Campbell ◽  
Nile F. Hartman ◽  
Jeffrey L. Moore ◽  
James V. Suggs ◽  
Janet M. Cobb
Keyword(s):  
Evanescent Field ◽  
Chemical Amplification

A CHEMICAL AMPLIFICATION SYSTEM FOR CONDUCTIOMETRIC MONITORING OF AIRBORNE CO2PARTIAL PRESSURES

2000 ◽  
Vol 28 (4) ◽  
pp. 269-280 ◽  
Author(s):  
James E. Atwater ◽  
Jeffrey L. DeHart ◽  
James R. Akse
Keyword(s):  
Chemical Amplification ◽  
Amplification System

Nitrobenzyl ester chemistry for polymer processes involving chemical amplification

1988 ◽  
Vol 21 (7) ◽  
pp. 2001-2006 ◽  
Author(s):  
F. M. Houlihan ◽  
A. Shugard ◽  
R. Gooden ◽  
E. Reichmanis
Keyword(s):  
Chemical Amplification
Sign in / Sign up

Export Citation Format

Share Document