Al-2.93 Photoacid Generator (Pag)

2021 ◽  
Author(s):  
Richard G. Jones ◽  
Christopher K. Ober ◽  
Teruaki Hayakawa ◽  
Christine K. Luscombe ◽  
Natalie Stingelin
Keyword(s):  
Photoacid Generator

scholarly journals Onium Salt Type Photoacid Generator Containing Tetrakis(pentafluorophenyl)borate.

2000 ◽  
Vol 13 (5) ◽  
pp. 711-714 ◽  
Author(s):  
Jong Soo Lee ◽  
Nobukazu Miyagawa ◽  
Shigeru Takahara ◽  
Tsuguo Yamaoka
Keyword(s):  
Onium Salt ◽  
Photoacid Generator

The improved photosensitivity of photosensitive polyimides containing o ‐ nitrobenzyl ether groups induced by the addition of photoacid generator

2021 ◽  
Vol 59 (4) ◽  
pp. 340-352
Author(s):  
Gwang‐Sik Song ◽  
Youn‐Jung Heo ◽  
Jeong Ju Baek ◽  
Hyosun Lee ◽  
Geun Yeol Bae ◽  
...  
Keyword(s):  
Photoacid Generator

Transparency vs. efficiency in 193-nm photoacid generator design

2002 ◽  
Author(s):  
Gerd Pohlers ◽  
Yasuhiro Suzuki ◽  
Nicholas Chan ◽  
James F. Cameron
Keyword(s):  
Generator Design ◽  
193 Nm ◽  
Photoacid Generator

A fluorescent and halochromic indolizine switch

2016 ◽  
Vol 4 (14) ◽  
pp. 2744-2747 ◽  
Author(s):  
Yang Zhang ◽  
Jaume Garcia-Amorós ◽  
Burjor Captain ◽  
Françisco M. Raymo
Keyword(s):  
Proton Transfer ◽  
Polymer Film ◽  
Molecular Switch ◽  
Photoacid Generator

Proton transfer from a photoacid generator to a halochromic molecular switch within a polymer film permits the imprinting of fluorescent patterns under the influence of optical stimulations.

scholarly journals Photosensitive Poly(benzoxazole) Based on Poly(o-hydroxy amide), Dissolution Inhibitor, Thermoacid Generator, and Photoacid Generator

2007 ◽  
Vol 39 (3) ◽  
pp. 245-251 ◽  
Author(s):  
Tomohito Ogura ◽  
Ko-ta Yamaguchi ◽  
Yuji Shibasaki ◽  
Mitsuru Ueda
Keyword(s):  
Photoacid Generator

Light Dose-Dependent Thickness Control of Photoacid Generator-Bearing Hydrogel

2015 ◽  
Vol 358 (1) ◽  
pp. 52-58 ◽  
Author(s):  
Taku Satoh ◽  
Kimio Sumaru ◽  
Toshiyuki Takagi ◽  
Toshiyuki Kanamori
Keyword(s):  
Light Dose ◽  
Thickness Control ◽  
Dose Dependent ◽  
Photoacid Generator

Photopatterning of Carbon Dots in Poly(Vinyl Alcohol) with Photoacid Generator

2022 ◽  
pp. 2100868
Author(s):  
Yixuan Wang ◽  
Xingtian Hao ◽  
Haiyan Peng ◽  
Xingping Zhou ◽  
Xiaolin Xie
Keyword(s):  
Carbon Dots ◽  
Vinyl Alcohol ◽  
Poly Vinyl Alcohol ◽  
Photoacid Generator

Effect of photoacid generator additives on the dissolution behavior of bis-trifluoromethyl carbinol substituted polynorbornene

2004 ◽  
Author(s):  
Trevor Hoskins ◽  
Cody M. Berger ◽  
Peter J. Ludovice ◽  
Clifford L. Henderson ◽  
Larry D. Seger ◽  
...  
Keyword(s):  
Dissolution Behavior ◽  
Photoacid Generator

Photoacid generator–polymer interaction on the quantum yield of chemically amplified resists for extreme ultraviolet lithography

2018 ◽  
Vol 6 (27) ◽  
pp. 7267-7273 ◽  
Author(s):  
Roberto Fallica ◽  
Yasin Ekinci
Keyword(s):  
Quantum Yield ◽  
Extreme Ultraviolet ◽  
Extreme Ultraviolet Lithography ◽  
Polymer Backbone ◽  
Ultraviolet Lithography ◽  
Chemically Amplified ◽  
Chemically Amplified Resists ◽  
Photoacid Generator ◽  
Polymer Interaction

The rate of photoacid generation is measured experimentally and it is demonstrated to depend on the interaction between polymer backbone and photoacid generator. The clearing volume per absorbed photon and per generated photoacid is also calculated and discussed in view of lithographic resolution and roughness.

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