Next-generation lithography – an outlook on EUV projection and nanoimprint
Jan van Schoot
◽
Helmut Schift
2009 ◽
Vol 129
(3)
◽
pp. 393-398
2000 ◽
Vol 18
(4)
◽
pp. 1119-1124
◽
Kenneth Racette
◽
Cameron Brooks
◽
C. Richard Guarnieri
◽
Dennis Hendy
Booky Lee
◽
Sharon Wang
◽
Toroy Tian
◽
Samuel Yang
◽
Roy Chen
2002 ◽
Vol 38
(1)
◽
pp. 95-100
◽
R.E. Fontana
◽
J. Katine
◽
M. Rooks
◽
R. Viswanathan
◽
J. Lille
◽
...
Zhongming Zhang
◽
Hongxue Wang
Kedar Patel
◽
Thomas Wallow
◽
Harry J. Levinson
◽
Costas J. Spanos
Marcus Kaestner
◽
Yana Krivoshapkina
◽
Ivo W. Rangelow
2007 ◽
Vol 43
(03)
◽
pp. 1
◽
2000 ◽
Vol 37
(6)
◽
pp. 1067
Kim Kyoung Seok
◽
Lee Seung Yoon
◽
Park Chang Mo
◽
Ahn Jinho