scholarly journals Design, Fabrication, and Characterization of a Thin-Film Nickel-Titanium Shape Memory Alloy Diaphragm for Use in Micro-Electro-Mechanical Systems

2011 ◽  
Author(s):  
Brian Joel Alvarez
Keyword(s):  
Thin Film ◽  
Shape Memory Alloy ◽  
Shape Memory ◽  
Mechanical Systems ◽  
Nickel Titanium ◽  
Micro Electro Mechanical Systems ◽  
Fabrication And Characterization

Fabrication of Silicon-Based Shape Memory Alloy Micro-Actuators

1992 ◽  
Vol 276 ◽  
Author(s):  
A. David Johnson ◽  
J. D. Busch ◽  
Curtis A. Ray ◽  
Charles Sloan
Keyword(s):  
Thin Film ◽  
Shape Memory Alloy ◽  
Shape Memory ◽  
Nickel Titanium ◽  
Titanium Film ◽  
Micro Electro Mechanical Systems ◽  
Actuation Mechanism ◽  
Micro Actuators ◽  
Chemical Milling ◽  
Silicon Based

ABSTRACTThin film shape memory alloy has been integrated with silicon in a new actuation mechanism for micro-electro-mechanical systems. This paper compares nickel-titanium film with other actuators, describes recent results of chemical milling processes developed to fabricate shape memory alloy micro-actuators in silicon, and describes simple actuation mechanisms which have been fabricated and tested.

scholarly journals Fabrication and Characterization of Freestanding NiTi Based Thin Film Materials for Shape Memory Micro-actuator Applications

2019 ◽  
Vol 5 (4) ◽  
pp. 327-335 ◽  
Author(s):  
Christoph Bechtold ◽  
Christoph Chluba ◽  
Christiane Zamponi ◽  
Eckhard Quandt ◽  
Rodrigo Lima de Miranda
Keyword(s):  
Thin Film ◽  
Shape Memory ◽  
Micro Actuator ◽  
Fabrication And Characterization

Fabrication and characterization of a novel bionic manipulator using a laser processed NiTi shape memory alloy

2020 ◽  
Vol 122 ◽  
pp. 105876 ◽  
Author(s):  
Zhi Zeng ◽  
J.P. Oliveira ◽  
Sansan Ao ◽  
Wei Zhang ◽  
Jiangmei Cui ◽  
...  
Keyword(s):  
Shape Memory Alloy ◽  
Shape Memory ◽  
Niti Shape Memory Alloy ◽  
Fabrication And Characterization
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