Fabrication of Silicon-Based Shape Memory Alloy Micro-Actuators

1992 ◽  
Vol 276 ◽  
Author(s):  
A. David Johnson ◽  
J. D. Busch ◽  
Curtis A. Ray ◽  
Charles Sloan
Keyword(s):  
Thin Film ◽  
Shape Memory Alloy ◽  
Shape Memory ◽  
Nickel Titanium ◽  
Titanium Film ◽  
Micro Electro Mechanical Systems ◽  
Actuation Mechanism ◽  
Micro Actuators ◽  
Chemical Milling ◽  
Silicon Based

ABSTRACTThin film shape memory alloy has been integrated with silicon in a new actuation mechanism for micro-electro-mechanical systems. This paper compares nickel-titanium film with other actuators, describes recent results of chemical milling processes developed to fabricate shape memory alloy micro-actuators in silicon, and describes simple actuation mechanisms which have been fabricated and tested.

Simulation on Uniaxial-Tension Behavior of NiTi Shape Memory Alloy Films

2009 ◽  
Vol 79-82 ◽  
pp. 1209-1212
Author(s):  
Shuang Shuang Sun ◽  
Jing Dong
Keyword(s):  
Shape Memory Alloy ◽  
Shape Memory ◽  
Uniaxial Tension ◽  
Theoretical Foundation ◽  
Quantitative Description ◽  
Experimental Results ◽  
Niti Shape Memory Alloy ◽  
Alloy Films ◽  
Actuation Mechanism ◽  
Micro Actuators

Based on experimental results reported in the reference, Liang-Rogers’ constitutive model for SMA is used to simulate the stress-strain curves of NiTi shape memory alloy films under uniaxial tension with isothermal conditions. The effects of film compositions and temperature on the tensile behavior of NiTi shape memory alloy films are discussed. By comparing the simulation results with the experimental results, it is found that the simulation curves agree basically with the experimental curves except that the phase-transformation regions are wider in the simulation curves. This demonstrates that the Liang-Rogers’ model can be used to predict the thermomechanical behavior of shape memory alloy films roughly. This study provides some theoretical foundation for the quantitative description and prediction of the actuation mechanism when shape memory alloy films are used as micro-actuators.

A Silicon-Based Shape Memory Alloy Microvalve

1992 ◽  
Vol 276 ◽  
Author(s):  
Curtis A. Ray ◽  
Charles L. Sloan ◽  
A. David Johnson ◽  
John D. Busch ◽  
Bruce R. Petty
Keyword(s):  
Thin Film ◽  
Shape Memory Alloy ◽  
Low Power ◽  
Shape Memory ◽  
High Speed ◽  
Large Deflections ◽  
Silicon Based

ABSTRACTA new actuator for silicon micro-valves has been developed and tested. A thin film shape memory alloy provides for large deflections with high speed, low power, and small size. The actuator is batch fabricated with planar processes.

Improved Electrical and Mechanical Properties of Niti/TiOx/PZT/TiOx Thin Film Heterostructures

2012 ◽  
Vol 185 ◽  
pp. 25-27 ◽  
Author(s):  
Nitin Choudhary ◽  
D.K. Kharat ◽  
Davinder Kaur
Keyword(s):  
Thin Film ◽  
Mechanical Properties ◽  
Shape Memory Alloy ◽  
Shape Memory ◽  
High Performance ◽  
Piezoelectric Properties ◽  
Nickel Titanium ◽  
Excellent Candidate ◽  
Dielectric And Piezoelectric Properties ◽  
Thin Film Devices

Nickel-titanium (NiTi) alloys are high-performance shape memory alloy actuator materials [1]. These alloys are metals possessing a memory, which can be triggered thermally or mechanically. Thin film of nickel-titanium shape memory alloy (SMA) is an excellent candidate for micro electric mechanical systems (MEMS). On the other hand, PZT is well known for its superior ferroelectric, dielectric and piezoelectric properties [2]. Integrating a ferroelectric (PZT) with ferroelastic (NiTi) material is technically interesting as the resulting heterostructure may then produce the properties associated with both of the materials and enhances the performance of MEMS based devices [3]. An important issue in the synthesis of NiTi/PZT hybrid heterostructure is the formation of appropriate crystalline phases of each material. The interdiffusions present at the interface of NiTi and PZT layer makes it difficult to obtain the optimal properties of both the components suitably at lower thickness values. With the miniaturization of active thin film devices, particularly for MEMS applications, it is desirable to obtain the best properties at lower thickness values. Therefore, in the present study, we have tried to lower the thickness of top NiTi films with the help of thin TiOx buffer layer between PZT and NiTi films. As expected, the excellent structural, electrical and mechanical properties of the NiTi/PZT heterostructure were achieved at lower thickness values.

scholarly journals Active Damping of Thin Film Shape Memory Alloy Devices

PAMM ◽  
2021 ◽  
Vol 20 (1) ◽  
Author(s):  
S. Ahmadi ◽  
K. Jacob ◽  
F. Wendler ◽  
A. Padhy ◽  
M. Kohl
Keyword(s):  
Thin Film ◽  
Shape Memory Alloy ◽  
Shape Memory ◽  
Active Damping
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