scholarly journals The use of ionic implantation in the synthesis nano palladium for biosensors

2018 ◽  
Vol 4 (3) ◽  
Author(s):  
Vitalii Honcharov
Keyword(s):  
Ionic Implantation

Oxygen enhancement induced by ionic implantation in scandium diphthalocyanine thin films

1990 ◽  
Vol 68 (1) ◽  
pp. 66-69 ◽  
Author(s):  
S. Robinet ◽  
M. Gauneau ◽  
M. Salvi ◽  
C. Clarisse ◽  
R. Chaplain
Keyword(s):  
Thin Films ◽  
Ionic Implantation ◽  
Oxygen Enhancement

Ionic implantation at low energy: application to the shallow junction accomplishment and surface functionalization

1997 ◽  
Vol 90 (3) ◽  
pp. 217-221
Author(s):  
L. Kaabi ◽  
C. Gontrand ◽  
P. Pinard ◽  
B. Balland ◽  
B. Remaki ◽  
...  
Keyword(s):  
Surface Functionalization ◽  
Low Energy ◽  
Shallow Junction ◽  
Energy Application ◽  
Ionic Implantation

scholarly journals Computational Study of Damage Profiles and Energy Loss of Gallium Ion in Germanium Substrate

2020 ◽  
Vol 6 (1) ◽  
pp. 117-122
Author(s):  
K. Giri ◽  
A. Bhandari
Keyword(s):  
Energy Loss ◽  
Incident Energy ◽  
Computational Study ◽  
Target Displacement ◽  
Collision Process ◽  
Nuclear Stopping ◽  
Germanium Substrate ◽  
Ionic Implantation ◽  
Computational Calculation

Computational calculation of energy loss and study of damage profiles during ionic implantation by gallium ions on germanium had been carried out. The required energies for doping of gallium ion on germanium, in order to obtain maximum damage at 600 Å, were calculated using SRIM; Stopping and Range of Ions in Matter. The ions when implanted independently on germanium causes the production of germanium recoils, vacancy-interstitial pairs, and phonons during the collision process. For 130 keV gallium ion, the energy used for ionization, phonon production and vacancies creation are 37.713 keV (29.01% of incident energy), 90.006 keV (64.29% of incident energy) and 8.71 keV (6.7% of incident energy) respectively. The amount of target displacement, replacement collisions and vacancies were also evaluated. Doping of gallium ions on germanium also reveals that the energy loss due to nuclear stopping was greater than electronic stopping.

Sign in / Sign up

Export Citation Format

Share Document