MEMS Micro-Mirror Array for Electrostatic Field Distribution Measurement System
2010 ◽
Vol 130
(12)
◽
pp. 575-579
Keyword(s):
2014 ◽
Vol 134
(12)
◽
pp. 378-384
◽
2015 ◽
Vol 135
(8)
◽
pp. 311-316
◽
Keyword(s):
2006 ◽
Vol 445-448
◽
pp. 347-352
◽