Synthesis of Controllably Grown Carbon Nanotubes Interconnects

Intra-connects (bridges spanning across in plane electrodes), which were made of carbon nanotube (CNT), were fabricated by CO Plasma Enhanced Chemical Vapor Deposition (PECVD), ethanol CVD and pyrolitic CO CVD. CO PECVD has been used with CO/H2 mixture at relatively low temperatures. Its yield was relatively low though and the quality of CNT intra-connect was not to par. Ethanol CVD resulted in many more multi-wall carbon nanotube (MWCNT) than single-wall carbon nanotube (SWCNT) intra-connects. CO CVD was the most effective and simplest way to grow CNT interconnects among the three methods, yielding well-aligned and straight SWCNT bridges.