Preparation and Properties of Superconducting thin Films by Excimer Laser Ablation

ABSTRACTExcimer laser ablation with an in situ heat treatment was used to prepare high quality superconducting YBa2Cu3O7−x thin films on (100)-SrTiO3 and (100)-LaAlO3 substrates. A pulsed excimer laser (XeCl; 308 nm) was used to ablate a rotating, bulk YBa2Cu3O7−x target at a laser energy density of 2–3 J/cm2. Based on four-probe dc resistance measurements, the films exhibited superconducting transition temperatures (Tc, midpoint) of 88 and 87K with 2K (90–10%) transition widths for SrTiO3 and LaAlO3, respectively. Transport critical current densities (Jc) measured at 77K were 2 × 106 and 1 × 106 A/cm2 in zero field for SrTiO3 and LaAlO3, respectively. X-ray diffraction (XRD) analysis showed the films to be highly oriented, with the c-axis perpendicular to the substrate surface.

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Synthesis and Characterization of Ferroelectric Thin Films by KrF Excimer Laser Ablation for Memory Applications

MRS Proceedings ◽

10.1557/proc-526-211 ◽

1998 ◽

Vol 526 ◽

Cited By ~ 1

Author(s):

Ashok Kumar ◽

M.R. Alam

Keyword(s):

Thin Films ◽

Laser Ablation ◽

Excimer Laser ◽

Lead Zirconate Titanate ◽

Laser Energy ◽

Ferroelectric Thin Film ◽

Lead Zirconate ◽

Test System ◽

Excimer Laser Ablation ◽

Krf Excimer Laser

AbstractPb(ZrxTi1-x)O3 (lead zirconate titanate or PZT) ferroelectric thin film capacitors are of considerable interest for the realization of memory devices such as nonvolatile random access memories (NVRAMs). The PZT capacitors were prepared on platinized silicon Pt/(100)Si using conducting oxide LaxSr1-xCoO3 (lanthanum strontium cobalt oxide or LSCO) as electrodes. The PZT and LSCO thin films were deposited by the KrF excimer laser ablation technique. The optimum preparation conditions such as oxygen pressure, laser energy influence and substrate temperature were investigated. The PZT and LSCO films grown on Pt/(100)Si are polycrystalline. The crystallographic properties of the films were determined using X-ray diffractometer (XRD) method. The electrical characterizations of the films including hysteresis loop, fatigue, and retention properties were determined by the RT66A Standardized Ferroelectric Test System.

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PbZr0.52Ti0.48O3 Ferroelectric Thin Films on Silicon by KrF Excimer Laser Ablation

MRS Proceedings ◽

10.1557/proc-604-239 ◽

1999 ◽

Vol 604 ◽

Author(s):

K. Ebihara ◽

F. Mitsugi ◽

M. Yamazato ◽

T. Ikegami ◽

J. Narayan

Keyword(s):

Laser Ablation ◽

Excimer Laser ◽

Remanent Polarization ◽

Laser Energy ◽

Ybco Superconductor ◽

X Ray Diffraction ◽

Excimer Laser Ablation ◽

Pzt Films ◽

Diffraction Patterns ◽

Krf Excimer Laser

AbstractThe Au / PbZrxTi1-xO3 (PZT) ferroelectrics / YBa2Cu3O7-x (YBCO) superconductor / yttria-stabilized zirconia (YSZ) heterostructures were prepared on Si (100) substrate by KrF excimer laser ablation technique. The x-ray diffraction patterns showed that the PZT films prepared on YBCO / YSZ /Si at 550°C, O2 100 mTorr and a laser energy density of 2 J/cm2(5Hz) are pure perovskite and highly oriented with the (00l) orientation. The polarization (P)-electric field (E) characteristics showed the remanent polarization Pr of 23 µC/cm2 and coercive field Ec, of 35 kV/cm. Pr of the PZT capacitor degraded to one half of initial value after about 1010 switching cycles (50 kHz).

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Preparation of PZT thin films on YBCO electrodes by KrF excimer laser ablation technique

Surface and Coatings Technology ◽

10.1016/s0257-8972(97)00663-4 ◽

1998 ◽

Vol 100-101 ◽

pp. 424-427 ◽

Cited By ~ 7

Author(s):

H. Kurogi ◽

Y. Yamagata ◽

K. Ebihara ◽

N. Inoue

Keyword(s):

Thin Films ◽

Laser Ablation ◽

Excimer Laser ◽

Pzt Thin Films ◽

Excimer Laser Ablation ◽

Ablation Technique ◽

Krf Excimer Laser ◽

Laser Ablation Technique

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Growth and study of SrBi2 (Ta, Nb)2 O9 thin films by pulsed excimer laser ablation

Solid State Communications ◽

10.1016/s0038-1098(00)00104-6 ◽

2000 ◽

Vol 114 (11) ◽

pp. 585-588 ◽

Cited By ~ 9

Author(s):

S Bhattacharyya ◽

S.S.N Bharadwaja ◽

S.B Krupanidhi

Keyword(s):

Thin Films ◽

Laser Ablation ◽

Excimer Laser ◽

Excimer Laser Ablation

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Characterization of C-N thin films deposited by reactive excimer laser ablation of graphite targets in nitrogen atmosphere

Thin Solid Films ◽

10.1016/s0040-6090(97)00296-4 ◽

1997 ◽

Vol 307 (1-2) ◽

pp. 54-59 ◽

Cited By ~ 30

Author(s):

A.P. Caricato ◽

G. Leggieri ◽

A. Luches ◽

A. Perrone ◽

E. Gyorgy ◽

...

Keyword(s):

Thin Films ◽

Laser Ablation ◽

Excimer Laser ◽

Nitrogen Atmosphere ◽

Excimer Laser Ablation

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Preparation of PZT/YBCO/YAIO Heterostructure Thin Films by KrF Excimer Laser Ablation

MRS Proceedings ◽

10.1557/proc-526-193 ◽

1998 ◽

Vol 526 ◽

Author(s):

Kenji Ebihara ◽

Hiromnitsu Kurogi ◽

Yukihiko Yamagata ◽

Tomoaki Ikegami ◽

Alexander M. Grishin

Keyword(s):

Thin Films ◽

Laser Ablation ◽

Excimer Laser ◽

Ferroelectric Properties ◽

Perovskite Oxide ◽

Excimer Laser Ablation ◽

Fatigue Characteristics ◽

Krf Excimer Laser ◽

Operation Frequency ◽

Deposition Conditions

AbstractThe perovskite oxide YBa2Cu3O7-x (YBCO) and Pb(ZrxTi1-x)O3 (PZT) thin films have been deposited for superconducting-ferroelectric devices. KrF excimer laser ablation technique was used at the deposition conditions of 200-600mTorr O2, 2-3J/cm2 and 5-10 Hz operation frequency. Heterostructures of PZT-YBCO-YAlO3:Nd show the zero resistivity critical temperature of 82K and excellent ferroelectric properties of remnant polarization 32 μC/cm2, coercive force of 80kV/cm and dielectric constant 800. Cycling fatigue characteristics and leakage current are also discussed.

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Preparation of PbZrxTi1−xO3 Thin Films by KrF Excimer Laser Ablation Technique

MRS Proceedings ◽

10.1557/proc-433-237 ◽

1996 ◽

Vol 433 ◽

Cited By ~ 2

Author(s):

Hiromitsu Kurogi ◽

Yukihiko Yamagata ◽

Tomoaki Ikegami ◽

Kenji Ebihara ◽

Bok Yin Tong

Keyword(s):

Thin Films ◽

Laser Ablation ◽

Excimer Laser ◽

Oxygen Pressure ◽

Ferroelectric Properties ◽

Pzt Thin Films ◽

Excimer Laser Ablation ◽

Pzt Films ◽

Krf Excimer Laser ◽

Laser Ablation Technique

AbstractPb(ZrxTi1−x)O3(PZT) thin films have excellent ferroelectric, optical, piezoelectric and pyroelectric properties. We prepared PZT thin films using the excimer laser ablation technique. A pulsed KrF excimer laser was used to ablate PZT bulk targets. We have studied optimum preparation conditions such as an oxygen pressure, a laser energy fluence and a substrate temperature.In this paper, we investigated the composition, crystallization and ferroelectric properties of the PZT films prepared under various deposition conditions.The X-ray diffraction (XRD) patterns showed that the PZT films prepared on MgO(100) substrates at 600°C and with a laser fluence of 2J/cm2 had a perovskite - pyrochlore mixed structure. The condition of 100 mTorr oxygen pressure provided high quality perovskite films. It is found that the stoichiometric composition of the deposited films is obtained in ambient oxygen of 100˜400 mTorr. The ferroelectric properties of the Pt/PZT/Pt/MgO structure were studied. The capacitance-voltage characteristics and the corresponding hysteresis loop of the dielectric-electric field curve were discussed.We also studied optical emission of the PZT plasma plume to understand quantitative relation between the PZT film quality and the ablation plume plasma. We identified spectral lines originated in Pb, Pb+, Zr, Zr+, Ti, Ti+, PbO and TiO. These spectral intensities have remarkable dependence on the ambient O2 pressure.

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