Optical Characterization of Focused Ion Beam Implanted AlGaAs/GaAs Multiple Quantum Well Structures

1993 ◽  
Vol 326 ◽  
Author(s):  
Howard E. Jackson
1992 ◽  
Author(s):  
Howard E. Jackson ◽  
Ahn G. Choo ◽  
Bernard L. Weiss ◽  
Joseph T. Boyd ◽  
Andrew J. Steckl ◽  
...  

2008 ◽  
Vol 93 (11) ◽  
pp. 111906 ◽  
Author(s):  
L. Lahourcade ◽  
P. K. Kandaswamy ◽  
J. Renard ◽  
P. Ruterana ◽  
H. Machhadani ◽  
...  

2013 ◽  
Vol 52 (8S) ◽  
pp. 08JL10 ◽  
Author(s):  
Liyang Zhang ◽  
Ruben R. Lieten ◽  
Magdalena Latkowska ◽  
Michał Baranowski ◽  
Robert Kudrawiec ◽  
...  

2007 ◽  
Vol 244 (5) ◽  
pp. 1644-1649
Author(s):  
D. Y. Lin ◽  
J. J. Shiu ◽  
J. D. Wu ◽  
C. S. Yang ◽  
W. C. Chou

1993 ◽  
Vol 324 ◽  
Author(s):  
Ahn Goo Choo ◽  
Xuelong. Cao ◽  
Spirit Tlali ◽  
Howard E. Jackson ◽  
Peter Chen ◽  
...  

AbstractRaman and photoluminescence (PL) spectra have been used to characterize A10.3Ga0.7As/GaAs multiple quantum well (MQW) structures that have been patterned by focused ion beam (FIB) implantation followed by rapid thermal annealing (RTA). Microprobe Raman scattering is used to identify the appropriate RTA and FIB implantation conditions that provide for removal of implantation-induced damage and for compositional intermixing. FIB patterned wire-like structures are characterized by spatially resolved PL spectra.


1992 ◽  
Vol 281 ◽  
Author(s):  
Mukesh Kumar ◽  
Gregory N. De Brabander ◽  
Peter Chen ◽  
Joseph T. Boyd ◽  
Andrew J. Steckl ◽  
...  

ABSTRACTOptical channel waveguiding in AlGaAs multiple quantum well structures formed by compositional mixing implemented by focused ion beam (FIB) implantation is demonstrated. To achieve selective mixing, Si is FIB implanted with a dose of 5×1014 cm−2 followed by RTA at 950°C for 10 s. Raman microprobe spectra are used to characterize the lateral variation of mixing. Propagation loss in a channel waveguide is measured. Measurement of the waveguide mode field distribution allows for the determination of changes in refractive index due to mixing and an approximate mixing depth.


1991 ◽  
Vol 9 (1-3) ◽  
pp. 297-300 ◽  
Author(s):  
R. Schwedler ◽  
K. Wolter ◽  
B. Gallmann ◽  
D. Grützmacher ◽  
M. Stollenwerk ◽  
...  

1993 ◽  
Vol 73 (12) ◽  
pp. 8489-8494 ◽  
Author(s):  
J. M. Zavada ◽  
F. Voillot ◽  
N. Lauret ◽  
R. G. Wilson ◽  
B. Theys

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