Single-Crystal Fine-Positioning Devices for Scanned-Probe Microscopies
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AbstractWe have developed a novel fine-positioning device for scanned-probe microscopies. Instead of the conventional scanner tube made of ceramic PZT material, we have constructed analogous structures from single-crystal piezoelectric wafers. Single-crystal materials, in particular Lithium Niobate, are available which solve many of the problems inherent with PZT. In addition, their superior thermal and mechanical properties lead to improved performance in a number of significant ways. We discuss the actual implementation of this idea in the construction of a scanner, possible applications for this design, and briefly discuss results obtained.
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2014 ◽
Vol 49
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pp. 640-644
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2017 ◽
Vol 460
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pp. 42-47
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2017 ◽
Vol 459
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pp. 31-37
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2008 ◽
Vol 71
(2)
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pp. 578-583
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2016 ◽
Vol 78
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pp. 96-102
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2017 ◽
Vol 1
(6)
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pp. 1107-1117
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