Fast Surface Profiling by White-Light Interferometry Using Symmetric Spectral Optical Filter
2010 ◽
Vol E93-A
(2)
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pp. 542-549
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2012 ◽
Vol 11
(1)
◽
pp. 81-93
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1999 ◽
Vol 46
(6)
◽
pp. 993-1001
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2012 ◽
Vol 50
(8)
◽
pp. 1084-1088
◽
2000 ◽
Vol 36
(1)
◽
pp. 16-25
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Keyword(s):