Extensive-dynamic-range and high-resolution surface profiling with phase-sensitive spectral-domain white-light interferometry

2021 ◽  
Vol 60 (13) ◽  
pp. 3604
Author(s):  
Zhicheng Jiao ◽  
Yunfei Jiang ◽  
Yuqian Zhao ◽  
Jian Liu ◽  
Yao Yu ◽  
...  
Keyword(s):  
High Resolution ◽  
White Light ◽  
Dynamic Range ◽  
Spectral Domain ◽  
White Light Interferometry ◽  
Surface Profiling ◽  
Phase Sensitive

High-Resolution Surface Topography Measurement Based on Frequency-Domain Analysis in White Light Interferometry

2018 ◽  
Vol 45 (6) ◽  
pp. 0604001
Author(s):  
邓钦元 Deng Qinyuan ◽  
唐燕 Tang Yan ◽  
周毅 Zhou Yi ◽  
杨勇 Yang Yong ◽  
胡松 Hu Song
Keyword(s):  
High Resolution ◽  
Frequency Domain ◽  
Surface Topography ◽  
White Light ◽  
Domain Analysis ◽  
Frequency Domain Analysis ◽  
White Light Interferometry

scholarly journals High resolution temperature independent refractive index measurement using differential white light interferometry

2013 ◽  
Vol 188 ◽  
pp. 1212-1217 ◽  
Author(s):  
Carlos Gouveia ◽  
Mohammad Zibaii ◽  
Hamid Latifi ◽  
Manuel J.B. Marques ◽  
J.M. Baptista ◽  
...  
Keyword(s):  
Refractive Index ◽  
High Resolution ◽  
White Light ◽  
White Light Interferometry ◽  
Refractive Index Measurement ◽  
Index Measurement

Electronically-scanned white light interferometry with enhanced dynamic range

1990 ◽  
Vol 26 (20) ◽  
pp. 1663 ◽  
Author(s):  
S. Chen ◽  
B.T. Meggitt ◽  
A.J. Rogers
Keyword(s):  
White Light ◽  
Dynamic Range ◽  
White Light Interferometry

Algorithm with optimum noise suppression for surface profiling by white-light interferometry

2004 ◽  
Author(s):  
Akira Hirabayashi ◽  
Yoji Nakayama ◽  
Hidemitsu Ogawa ◽  
Katsuichi Kitagawa
Keyword(s):  
White Light ◽  
Noise Suppression ◽  
White Light Interferometry ◽  
Surface Profiling
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