PLASMA GENERATION IN A LOW-PRESSURE HOLLOW-CATHODE NON-SELF-SUSTAINED GLOW DISCHARGE

Author(s):  
I. V. Lopatin ◽  
Yury Kh. Akhmadeev ◽  
Nikolay N. Koval ◽  
P. M. Schanin
2021 ◽  
Vol 64 (1) ◽  
pp. 125-129
Author(s):  
V.V. Denisov ◽  
◽  
Yu.A. Denisova ◽  
E.L. Vardanyan ◽  
E.V. Ostroverkhov ◽  
...  

The vacuum-arc plasma-assisted method was used to deposit a multilayer coating based on Ti and Al in two discharge systems - in a traditional plasma-assisted vacuum-arc spraying system and in a system for generating of gas-metal beam-plasma formation formed in a hollow cathode of a non-self-sustained low pressure glow discharge. The coatings obtained in the investigated discharge schemes are close in elemental and phase composition. In the coating deposited in the plasma-beam formation, the aluminum content is 8% lower, which is probably due to the overall higher average value of the ion flux density on the surface of the growing film in a non-self-sustained glow discharge. In the coating obtained by sputtering in a beam-plasma formation, there are no elements that are part of the material of the sputtered hollow cathode. Gas-metal beam-plasma formations, formed at low pressure, are promising in the processes of functional coatings deposition by the vacuum-arc plasma-assisted method.


2013 ◽  
Vol 41 (8) ◽  
pp. 2087-2096 ◽  
Author(s):  
Yury D. Korolev ◽  
Oleg B. Frants ◽  
Nikolay V. Landl ◽  
Ilja A. Shemyakin ◽  
Vladimir G. Geyman

Author(s):  
N.V. Landl ◽  
◽  
Y.D. Korolev ◽  
O.B. Frants ◽  
V.G. Geyman ◽  
...  

The results of investigation of low-pressure glow discharge with the hollow cathode for the conditions when the cathode cavity depth is comparable with cavity diameter are presented. Data on current distribution over the hollow-cathode surface using sectioned electrodes are obtained and the length of the cathode sheath is measured. It is shown that for the regime of suppressed glow discharge the main fraction of the total discharge current closes to the nearest to the anode cathode section. For the regime of ordinary glow discharge, when the cavity depth is equal to cavity diameter, discharge current over the cathode surface is distributed uniformly. The estimations of the discharge parameters and the values of the cathode sheath using the model of hollow-cathode discharge sustainment were done. Model agrees well with the experimental data.


2016 ◽  
Vol 44 (12) ◽  
pp. 2965-2972 ◽  
Author(s):  
Yonggan Liang ◽  
Chengxun Yuan ◽  
Ruilin Gao ◽  
Jieshu Jia ◽  
Gennady Kirsanov ◽  
...  

Author(s):  
N. V. Landl ◽  
Y. D. Korolev ◽  
O. B. Frants ◽  
V. G. Geyman ◽  
G. A. Argunov ◽  
...  

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