Plasma generation with increased ionization degree in pulsed high-current low-pressure hollow cathode glow discharge

Author(s):  
V. V. Yakovlev ◽  
◽  
et al.
2013 ◽  
Vol 41 (8) ◽  
pp. 2087-2096 ◽  
Author(s):  
Yury D. Korolev ◽  
Oleg B. Frants ◽  
Nikolay V. Landl ◽  
Ilja A. Shemyakin ◽  
Vladimir G. Geyman

2021 ◽  
Vol 63 (10) ◽  
pp. 1757-1765
Author(s):  
V. V. Yakovlev ◽  
V. V. Denisov ◽  
N. N. Koval ◽  
S. S. Kovalsky ◽  
E. V. Ostroverkhov ◽  
...  

2021 ◽  
Vol 64 (1) ◽  
pp. 125-129
Author(s):  
V.V. Denisov ◽  
◽  
Yu.A. Denisova ◽  
E.L. Vardanyan ◽  
E.V. Ostroverkhov ◽  
...  

The vacuum-arc plasma-assisted method was used to deposit a multilayer coating based on Ti and Al in two discharge systems - in a traditional plasma-assisted vacuum-arc spraying system and in a system for generating of gas-metal beam-plasma formation formed in a hollow cathode of a non-self-sustained low pressure glow discharge. The coatings obtained in the investigated discharge schemes are close in elemental and phase composition. In the coating deposited in the plasma-beam formation, the aluminum content is 8% lower, which is probably due to the overall higher average value of the ion flux density on the surface of the growing film in a non-self-sustained glow discharge. In the coating obtained by sputtering in a beam-plasma formation, there are no elements that are part of the material of the sputtered hollow cathode. Gas-metal beam-plasma formations, formed at low pressure, are promising in the processes of functional coatings deposition by the vacuum-arc plasma-assisted method.


2019 ◽  
Vol 26 (12) ◽  
pp. 123510 ◽  
Author(s):  
V. V. Denisov ◽  
Yu. H. Akhmadeev ◽  
N. N. Koval ◽  
S. S. Kovalsky ◽  
I. V. Lopatin ◽  
...  

2002 ◽  
Vol 81 (23) ◽  
pp. 4341-4343 ◽  
Author(s):  
A. Krokhmal ◽  
J. Z. Gleizer ◽  
Ya. E. Krasik ◽  
J. Felsteiner

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