Carbon nanotube (CNT) arrays have been synthesized by a repeated growth method using a custom-fabricated plasma-enhanced thermal chemical vapor deposition (PE-thermal CVD) apparatus. The initial catalyst is a layered structure prepared by depositing 10 nm of Al followed by 3 nm of Fe on an oxidized silicon substrate. Following CNT growth, the CNT arrays are removed using an ultrasonic cleaner, and another CNT array is grown on the remaining Fe-Al bimetalic nanoparticles without the addition of more catalyst. Annealing the catalytic substrate in air between growth cycles results in the removal of residual amorphous carbon along with the CNTs, and oxidation of the Fe-Al nanoparticles. The diameter of CNTs is reduced with repeated growth-annealing cycles, an effect of which is attributed to the diminishing size of the catalytically active nanoparticles with each cycle. After two growth cycles, SWNTs with the extraordinarily narrow diameter of 0.86 nm are synthesized. TheID/IGratio derived from the Raman spectrum of these of the SWNT arrays shows the remarkably low value of 0.22.
Regrowth of Carbon Nanotubes Array on Al Layer Coated Substrate
