Development perspective microelectromechanical systems (MEMS)by methods of semi-real simulation
2006 ◽
Vol 4
◽
pp. 288-305
Keyword(s):
The article deals with the issues related to the construction of microelectromechanical systems (MEMS), and the problems arising from their manufacture. Particular attention is paid to micromechanical parts of robot, which were developed by methods of semi-simulation using the virtual environment for designing, testing and debugging MEMS.
2006 ◽
Vol 4
◽
pp. 261-273
2011 ◽
Vol 127
◽
pp. 214-219