scholarly journals Pattern and Profile Measurement and Testing by Laser Beam Scanning

1985 ◽  
Vol 13 (1) ◽  
pp. 69-77
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Micromachines ◽  
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pp. 509-528 ◽  
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2021 ◽  
Vol 60 (SB) ◽  
pp. SBBK06
Author(s):  
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Naruki Fukunaga ◽  
Wenchang Yeh ◽  
Shigekazu Morito ◽  
Takuya Ohba

1997 ◽  
Author(s):  
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Evgeny B. Yakovlev ◽  
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...  

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