scholarly journals The Development of Materials for the Future Vacuum Technology. Magnetic Levitation Transport System for Extreme High Vacuum.

1993 ◽  
Vol 32 (11) ◽  
pp. 811-812 ◽  
Author(s):  
Kazuhiro Yoshihara ◽  
Masahiro Tosa
Keyword(s):  
Transport System ◽  
Magnetic Levitation ◽  
High Vacuum ◽  
Vacuum Technology ◽  
The Future

scholarly journals Magnetic Levitation Transport System for Extremly High Vacuum.

Shinku ◽  
1993 ◽  
Vol 36 (3) ◽  
pp. 253-256 ◽  
Author(s):  
Masahiro TOSA ◽  
Akiko ITAKURA ◽  
Kazuhiro YOSHIHARA
Keyword(s):  
Transport System ◽  
Magnetic Levitation ◽  
High Vacuum

Contamination-free transfer of silicon wafers with a magnetic levitation transport system in vacuum

Vacuum ◽  
1990 ◽  
Vol 41 (7-9) ◽  
pp. 1843-1845 ◽  
Author(s):  
H. Yamakawa ◽  
I. Moriyama ◽  
Y. Minamigawa ◽  
Y. Maeba ◽  
T. Takematsu ◽  
...  
Keyword(s):  
Transport System ◽  
Magnetic Levitation ◽  
Silicon Wafers
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