Contamination-free transfer of silicon wafers with a magnetic levitation transport system in vacuum

Vacuum ◽  
1990 ◽  
Vol 41 (7-9) ◽  
pp. 1843-1845 ◽  
Author(s):  
H. Yamakawa ◽  
I. Moriyama ◽  
Y. Minamigawa ◽  
Y. Maeba ◽  
T. Takematsu ◽  
...  
Keyword(s):  
Transport System ◽  
Magnetic Levitation ◽  
Silicon Wafers

scholarly journals Russia’s integrated transit transport system (itts) of on the basis of vacuum magnetic levitation transport (vmlt)

2018 ◽  
Vol 4 (3 suppl. 1) ◽  
pp. 57-84 ◽  
Author(s):  
Yuriy A. Terentyev ◽  
Valery V. Filimonov ◽  
Georgy G. Malinetskiy ◽  
Vladimir S. Smolin ◽  
Victor V. Koledov ◽  
...  
Keyword(s):  
Transport System ◽  
High Speed ◽  
Magnetic Levitation ◽  
Raw Materials ◽  
Transport Systems ◽  
Test Model ◽  
Trade Routes ◽  
Maximal Speed ◽  
Technical Solutions ◽  
Transport Potential

The Russian Federation is located at the crossroads of the trade routes of the Eurasian continent, where a significant volume of the transport flow of the world’s trade is formed. The transport potential of the territory of Russia, when implemented as an Integral Transit Transport System (ITTS), is comparable to the benefits from the traditional export of hydrocarbons and other raw materials. Analyzing the efficiency of transport systems, the key is the energy approach. The concept of ITTS is considered, based on all known and being developed transport lines, including high-speed vacuum magnetic levitation transport (VMLT). The fundamental problems are discussed being on the way to achieving the maximal speed, energy efficiency and throughput of VMLT. The preliminary findings are presented obtained from experiments on the test model of the VMLT route. It is concluded that there is a need for a deeper study of the properties of magnetic and superconducting materials in extreme high fields, power and speed regimes to search for fundamentally new technical solutions for the creation of VMLT

scholarly journals Operation of “russian maglev” transport system and medical-biological safety aspects

2017 ◽  
Vol 3 (3) ◽  
pp. 111-132 ◽  
Author(s):  
Timur D Vlasov ◽  
Artemiy V Rubinskiy
Keyword(s):  
Transport System ◽  
Magnetic Levitation ◽  
Low Frequency ◽  
Practical Significance ◽  
Railway Transport ◽  
Biological Safety ◽  
Biological Studies ◽  
Levitation System ◽  
Magnetic Levitation System

The article deals with the analysis of medical and biological safety of the results of work on the design and model-laboratory experiments of “Russian maglev” transport system. Purpose. The purpose of the work is determination of location and level of field physical characteristics of national magnetic levitation system “Russian maglev”, development of scientifically justified preventive-sanitary suggestions and recommendations necessary for design and application of the systems for protection, control and monitoring of hazardous effects of non-radiation physical fields on passengers, personnel and transported cargo and ecology. Methodology. To achieve the set purpose a review of modern ideas on the influence of constant and low frequency magnetic fields on people was carried out, characteristics of main sources of EMF influence on people during “Russian maglev” technologies operation were studied and described. The obtained results were compared with technical documents on electromagnetic safety. Results. As a result of this work, hygienic requirements for absolute levels and length of unfavourable factors impact on railway transport were determined, which are not mentioned in the active Sanitary Regulations and Instructions. Considering this, recommendations for the most safety placement of MF for people and safety means in crew vehicle were given. Practical significance. The significance of this work is that the preliminary work for medical-biological studies in conditions of full-size model was carried out.

Planar Flat Product Transport Using Viscous Traction

2008 ◽  
Author(s):  
Jeroen van Rij ◽  
Jasper Wesselingh ◽  
Ron A. J. van Ostayen ◽  
Jo W. Spronck ◽  
Robert H. Munnig Schmidt ◽  
...  
Keyword(s):  
Mathematical Model ◽  
Surface Area ◽  
Transport System ◽  
Glass Substrate ◽  
Silicon Wafers ◽  
Transport Function ◽  
Glass Substrates ◽  
Product Surface ◽  
Bearing Stiffness ◽  
Vertical Bearing

In this paper a new contactless transport system for thin, flat products, such as glass substrates and silicon wafers, is introduced. The transport function is realized using viscous traction on the product surface. After an explanation of the operating principles, a mathematical model is presented. Preliminary computations indicate that the generated acceleration is approximately 2.5 m/s2 for a glass substrate with a surface area of 2 m2 and a thickness of 0.7 mm. Furthermore, the vertical bearing stiffness for the considered actuator geometry of the system is 4.2·106 N/m, depending on the properties of the inflow and outflow points of the actuator cells.

A New Application of Rbs-Pixe with High Energy Microbeam

1986 ◽  
Vol 69 ◽  
Author(s):  
B. Raicu ◽  
H. Bakhru ◽  
S. Fesseha ◽  
W. M. Gibson
Keyword(s):  
Ion Implantation ◽  
Transport System ◽  
High Energy ◽  
Silicon Wafers ◽  
High Dose ◽  
Furnace Annealing ◽  
Pixe Analysis ◽  
X Ray ◽  
Technological Factors ◽  
Beam Sputtering

AbstractA beam of 2 MeV He+ ions with a diameter of 2 microns was used to perform Rutherford backscattering (RBS) and particle induced x-ray emission (PIXE) analysis on large residual defects formed by high dose arsenic (As) ion implantation and furnace annealing. Research results concerning contamination in implanted silicon wafers generated by primary beam sputtering, inadequate wafer transport system, and other technological factors are presented.

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