Kinetics of SiHCl3 and SiCl4 Evolution in Si(s)–HCl(g) System Simulated by Ab-initio MO
1996 ◽
Vol 388
(1-3)
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pp. 201-208
1983 ◽
Vol 48
(7)
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pp. 1842-1853
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2010 ◽
Vol 17
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pp. 415-422
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2007 ◽
Vol 111
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pp. 2156-2165
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1994 ◽
Vol 311
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pp. 205-210
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2000 ◽
Vol 104
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pp. 10807-10811
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