A Versatile LPCVD Silicon Nitride Platform For Heterogenous Photonic Circuits: Ultra Tight Thickness Control And Low Propagation Loss

2019 ◽  
Author(s):  
Ph. Helin ◽  
A. Firrincieli ◽  
A. Ray Chaudhuri ◽  
N. Pham ◽  
S. Lenci ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Propagation Loss ◽  
Photonic Circuits ◽  
Thickness Control

scholarly journals Growth of Aluminum Nitride on a Silicon Nitride Substrate for Hybrid Photonic Circuits

2021 ◽  
Author(s):  
Giulio Terrasanta ◽  
Manuel Müller ◽  
Timo Sommer ◽  
Stephan Gepraegs ◽  
Rudolf Gross ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Aluminum Nitride ◽  
Photonic Circuits

Silicon-nitride waveguide-based integrated photonic circuits for medical diagnostic and other sensing applications

2019 ◽  
Author(s):  
Rainer Hainberger ◽  
Paul Muellner ◽  
Stefan Nevlacsil ◽  
Alejandro Maese-Novo ◽  
Florian Vogelbacher ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Photonic Circuits ◽  
Sensing Applications ◽  
Medical Diagnostic

scholarly journals Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip [Invited]

2015 ◽  
Vol 3 (5) ◽  
pp. B47 ◽  
Author(s):  
Ananth Z. Subramanian ◽  
Eva Ryckeboer ◽  
Ashim Dhakal ◽  
Frédéric Peyskens ◽  
Aditya Malik ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Photonic Circuits

Hybrid Aluminum Nitride Integration on Silicon Nitride Photonic Circuits

2021 ◽  
Author(s):  
Giulio Terrasanta ◽  
Manuel Müller ◽  
Timo Sommer ◽  
Matthias Althammer ◽  
Menno Poot
Keyword(s):  
Silicon Nitride ◽  
Aluminum Nitride ◽  
Photonic Circuits

Up to 50 dB Extinction in Broadband Single-Stage Thermo- Optic Mach-Zehnder Interferometers for Programmable Low-Loss Silicon Nitride Photonic Circuits

2021 ◽  
Author(s):  
Ashutosh Rao ◽  
Gregory Moille ◽  
Xiyuan Lu ◽  
Daron Westly ◽  
Michael Geiselmann ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Single Stage ◽  
Low Loss ◽  
Photonic Circuits

Multilayer Silicon Nitride-on-Silicon Integrated Photonic Platform for 3D Photonic Circuits

2016 ◽  
Author(s):  
Wesley D. Sacher ◽  
Zheng Yong ◽  
Jared C. Mikkelsen ◽  
Antoine Bois ◽  
Yisu Yang ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Photonic Circuits

Silicon nitride on-silicon 3-dimensional photonic circuits for integrated photodetection

2016 ◽  
Author(s):  
Mike Buzbee ◽  
David Lombardo ◽  
Qiwen Zhan ◽  
Joshua Hendrickson ◽  
Andrew Sarangan ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Photonic Circuits ◽  
3 Dimensional

Influence of UV Light on PECVD Silicon Nitride Waveguide Propagation Loss

2018 ◽  
Author(s):  
Pieter Neutens ◽  
Monika Rutowska ◽  
Willem Van Roy ◽  
Roelof Jansen ◽  
Federico Buja ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Uv Light ◽  
Propagation Loss ◽  
Waveguide Propagation

Efficient integration of high-purity diamond nanostructures into silicon nitride photonic circuits

CLEO: 2014 ◽  
2014 ◽  
Author(s):  
Sara Mouradian ◽  
Tim Schröder ◽  
Carl Poitras ◽  
Luozhou Li ◽  
Jamie Cardenas ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
High Purity ◽  
Photonic Circuits ◽  
Efficient Integration
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