scholarly journals A Study on Electrochemical Machining Method in Ultrapure Water. Etching Process of Hydrogen-Terminated Si(001) Surface Atom by Hydroxyl Function.

2001 ◽  
Vol 67 (7) ◽  
pp. 1169-1174
Author(s):  
Hidekazu GOTO ◽  
Kikuzi HIROSE ◽  
Itsuki KOBATA ◽  
Yasushi TOMA ◽  
Yuzo MORI
Keyword(s):  
Electrochemical Machining ◽  
Etching Process ◽  
Surface Atom ◽  
Ultrapure Water ◽  
Water Etching

scholarly journals A Study on Electrochemical Machining Method in Ultrapure Water. Increase of Hydroxyl lon in Ultrapure Water by Catalytic Reaction.

2001 ◽  
Vol 67 (6) ◽  
pp. 932-936 ◽  
Author(s):  
Yuzo MORI ◽  
Hidekazu GOTO ◽  
Kikuzi HIROSE ◽  
Itsuki KOBATA ◽  
Yasushi TOMA ◽  
...  
Keyword(s):  
Catalytic Reaction ◽  
Electrochemical Machining ◽  
Ultrapure Water

scholarly journals Application of Electrochemical Machining in Ultrapure Water to Copper Damascene Process

2004 ◽  
Vol 70 (5) ◽  
pp. 666-670
Author(s):  
Yuzo MORI ◽  
Hidekazu GOTO ◽  
Kikuji HIROSE ◽  
Yasushi TOMA ◽  
Itsuki KOBATA ◽  
...  
Keyword(s):  
Electrochemical Machining ◽  
Ultrapure Water ◽  
Damascene Process

scholarly journals Development of Electrochemical Machining System in Ultrapure Water and Application to Planarization Machining Process.

2002 ◽  
Vol 68 (11) ◽  
pp. 1486-1491
Author(s):  
Yuzo MORI ◽  
Hidekazu GOTO ◽  
Kikuji HIROSE ◽  
Yasushi TOMA ◽  
Itsuki KOBATA ◽  
...  
Keyword(s):  
Electrochemical Machining ◽  
Machining Process ◽  
Ultrapure Water ◽  
Machining System

scholarly journals A Study on Electrochemical Machining Method in Ultrapure Water. Electrochemical Machining of Cathode Surface.

2002 ◽  
Vol 68 (9) ◽  
pp. 1241-1245 ◽  
Author(s):  
Yuzo MORI ◽  
Hidekazu GOTO ◽  
Kikuji HIROSE ◽  
Itsuki KOBATA ◽  
Yasushi TOMA ◽  
...  
Keyword(s):  
Cathode Surface ◽  
Electrochemical Machining ◽  
Ultrapure Water

Field-Ion Microscopy of BCC Metals: A Study of Image Differences and Topographical Variations

1973 ◽  
Vol 31 ◽  
pp. 114-115
Author(s):  
O. T. Inal ◽  
L. E. Murr
Keyword(s):  
Liquid Nitrogen ◽  
Liquid Nitrogen Temperature ◽  
Surface Atom ◽  
Image Brightness ◽  
Field Ion Microscopy ◽  
Topographic Features ◽  
Bcc Metals ◽  
Electron Orbital ◽  
Ion Microscopy ◽  
Field Ion Microscope

When sharp metal filaments of W, Fe, Nb or Ta are observed in the field-ion microscope (FIM), their appearance is differentiated primarily by variations in regional brightness. This regional brightness, particularly prominent at liquid nitrogen temperature has been attributed in the main to chemical specificity which manifests itself in a paricular array of surface-atom electron-orbital configurations.Recently, anomalous image brightness and streaks in both fcc and bee materials observed in the FIM have been shown to be the result of surface asperities and related topographic features which arise by the unsystematic etching of the emission-tip end forms.

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