Evaluation of Next Generation Fluids for ArF Immersion Lithography Beyond Water
2007 ◽
Vol 20
(5)
◽
pp. 729-738
◽
Hoang Tran
◽
Roger H. French
◽
Douglas J. Adelman
◽
Jerald Feldman
◽
Weiming Qiu
◽
...
2006 ◽
Vol 19
(5)
◽
pp. 641-646
◽
Taiichi Furukawa
◽
Katsuhiko Hieda
◽
Yong Wang
◽
Takashi Miyamatsu
◽
Kinji Yamada
◽
...
Hirotaka Miyamoto
◽
Hiroshi Furusato
◽
Keisuke Ishida
◽
Hiroaki Tsushima
◽
Akihiko Kurosu
◽
...
Taiichi Furukawa
◽
Takanori Kishida
◽
Kyouyuu Yasuda
◽
Tsutomu Shimokawa
◽
Zhi Liu
◽
...
Keisuke Ishida
◽
Takeshi Ohta
◽
Hirotaka Miyamoto
◽
Takahito Kumazaki
◽
Hiroaki Tsushima
◽
...
Toshihiro Oga
◽
Shinichi Matsumoto
◽
Taku Yamazaki
◽
Takeshi Ohta
◽
Satoru Bushida
Yong Wang
◽
Takashi Miyamatsu
◽
Taiichi Furukawa
◽
Kinji Yamada
◽
Tetsuo Tominaga
◽
...
Takeshi Ohta
◽
Keisuke Ishida
◽
Takahito Kumazaki
◽
Hiroaki Tsushima
◽
Akihiko Kurosu
◽
...
Tommy Oga
◽
Taku Yamazaki
◽
Takeshi Ohta
◽
Hiroaki Tsushima
◽
Satoru Bushida
Hiroshi Furusato
◽
Takahito Kumazaki
◽
Takeshi Ohta
◽
Hiroaki Tsushima
◽
Akihiko Kurosu
◽
...
Hirotaka Miyamoto
◽
Takahito Kumazaki
◽
Hiroaki Tsushima
◽
Akihiko Kurosu
◽
Takeshi Ohta
◽
...